Kinetic regularities of the chemical vapor deposition of nickel layers from bis-(ethylcyclopentadienyl)nickel

Russian Journal of Applied Chemistry

Volumn 85, Issue 5, 2012, Pages 742-746

  Protopopova, V S ^a   Alexandrov, S E ^a  

^a PETER THE GREAT ST PETERSBURG POLYTECHNIC UNIVERSITY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84862670313     PISSN: 10704272     EISSN: None     Source Type: Journal    
DOI: 10.1134/S1070427212050102     Document Type: Article

References (14)

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