Metalorganic chemical vapor deposition of nickel films from Ni(C5H5)2/H2

Journal of Materials Research

Volumn 15, Issue 8, 2000, Pages 1828-1833

  Kang, Jin Kyu ^a   Rhee, Shi Woo ^a  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL STRUCTURE; DESORPTION; DISSOCIATION; ELECTRIC CONDUCTIVITY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MORPHOLOGY; PYROLYSIS; REACTION KINETICS; THERMOANALYSIS; THIN FILMS;

NICKEL FILMS;

NICKEL COMPOUNDS;

EID: 0034256179     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.2000.0264     Document Type: Article

References (14)