Workfunction tuning of zinc oxide films by argon sputtering and oxygen plasma: An experimental and computational study

Journal of Physics D: Applied Physics

Volumn 45, Issue 6, 2012, Pages

  Kuo, Fang Ling ^a   Li, Yun ^a   Solomon, Marvin ^a   Du, Jincheng ^a   Shepherd, Nigel D ^a  

^a UNIVERSITY OF NORTH TEXAS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON SPUTTERING; CHARGE REDISTRIBUTION; COMPUTATIONAL MODELLING; COMPUTATIONAL STUDIES; HYDROCARBON CONTAMINATION; MAGNETRON SPUTTER DEPOSITION; OPTOELECTRONIC APPLICATIONS; OXYGEN PLASMA TREATMENTS; OXYGEN PLASMAS; RADIO FREQUENCIES; SPECIFIC SURFACE; SPUTTER CLEANING; SURFACE DIPOLE; SURFACE DIPOLE MOMENT; TRANSPARENT CONDUCTING OXIDE; ZNO; ZNO FILMS; ZNO SURFACE;

LIGHT EMITTING DIODES; OXIDE FILMS; OXYGEN; PLASMA APPLICATIONS; PLASMAS; ULTRAVIOLET PHOTOELECTRON SPECTROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

ZINC OXIDE;

EID: 84862283973     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/45/6/065301     Document Type: Article

References (26)

1. Zhang L, Zhang H, Bai Y, Ma J, Cao J, Jiang X and Zhang Z 2008 Solid State Commun. 146 387
2. Kuo F, Maneshian M H and Shepherd N D 2011 Thin Solid Films 520 475
3. Huanga H, Chua S, Kaod P, Chena Y, Yanga M and Tsenga Z 2009 J. Alloys Compounds 479 520
4. Park S K, Lee J, Hwang C and Chu H 2005 J. Appl. Phys. 44 L242
5. Forsythe E W, Gao Y, Provost L G and Tompa G S 1999 J. Vac. Sci. Technol. A 17 1761
6. Kuo F, Lin M, Mensah B A, Scharf T W and Shepherd N D 2010 Phys. Status Solidi a 207 2487
7. 2007 Mineral Commodities Summary: Indium, US Geological Survey, Mineral Commodity Summaries, January
8. Tao C S, Jiang J and Tao M 2011 Natural resource limitations to terawatt solar cell deployment ECS Trans. 33 3
9. Jaqadish C and Pearton S J 2006 Zinc Oxide Bulk, Thin Films and Nanostructures: Processing, Properties (Amsterdam: Elsevier)
10. Uhlrich J J, Franking R, Hamers R J and Kuech T F 2009 J. Phys. Chem. C 113 21147
11. Park S H, Kim H J, Cho M, Yi Y, Cho S W, Yang J and Kim H 2011 Appl. Phys. Lett. 98 082111
12. Lin M, Li M, Chen W, Omary M A and Shepherd N D 2011 Solid State Electron. 56 196
13. Li M, Chen W, Lin M, Omary M A and Shepherd N D 2009 Org. Electron. 20 863
14. Wang W, Feng Q, Jiang K, Huang J, Zhang X, Song W and Tan R 2011 Appl. Surf. Sci. 257 3884
15. Islam M N, Ghosh T B, Chopra K L and Acharya H N 1996 Thin Solid Films 280 20
16. Yoon K H and Cho J Y 2000 Mater. Res. Bull. 35 39
17. Giordano L, Cinquini F and Pacchioni G 2005 Phys. Rev. B 73 045414
18. Singh-Miller N E and Marzari N 2009 Appl. Phys. Lett. 105 013711
19. Bocquet M-L, Rappe A M and Dai H-L 2005 Mol. Phys. 103 883
20. Erhart P and Albe K 2006 Phys. Rev. B 73 115207
21. Lany S and Zunger A 2007 Phys. Rev. Lett. 98 045501
22. Janotti A, Segev D and Van de Walle C G 2006 Phys. Rev. B 74 045202
23. Janotti A and Van de Walle C G 2007 Phys. Rev. B 75 121201
24. Palacios P, Snchez K and Wahnn P 2009 Thin Solid Films 517 2448
25. Perdew J P, Burke K and Ernzerhof M 1996 Phys. Rev. Lett. 77 3865
26. Leung T C, Kao C L, Su W S, Feng Y J and Chan C T 2003 Phys. Rev. B 68 195408