A MEMS-based pneumatic micro-conveyor for planar micromanipulation

Mechatronics

Volumn 22, Issue 5, 2012, Pages 515-521

  Yahiaoui, Réda ^a   Zeggari, Rabah ^a   Malapert, Julien ^a   Manceau, Jean François ^a  

^a UNIVERSITÉ DE FRANCHE COMTÉ   (France)

Author keywords

Conveyance system; Deep reactive ion etching (DRIE); Micro electromechanical systems (MEMS); Micro manipulation; Pneumatic micro actuator

Indexed keywords

CONVEYORS; JETS; MEMS; MICROMANIPULATORS; MICROOPTICS; PNEUMATICS; SILICON WAFERS;

CONVEYANCE SYSTEMS; DEEP REACTIVE ION ETCHING; MICRO ELECTROMECHANICAL SYSTEM (MEMS); MICRO CONVEYORS; MICRO MANIPULATION; MICRO-MACHINED; SILICON CHIP; SILICON MEMS;

PNEUMATIC ACTUATORS;

EID: 84862176416     PISSN: 09574158     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mechatronics.2011.04.005     Document Type: Article

References (23)

1. G. Thornell, M. Bexell, J.A. Schweitz, and S. Johansson Design and fabrication of a gripping tool for micromanipulation Sens Actuators A 53 1-3 1996 428 433
2. M.N.M. Zubir, B. Shirinzadeh, and Y. Tian Development of a novel flexure-based microgripper for high precision micro-object manipulation Sens Actuators A 150 2 2009 257 266
3. Arai F, Fukuda T. A new pick up and release method by heating for micromanipulation. In: Proceeding of IEEE workshop on micro electro mechanical systems, Nagoya; 1997. p. 383-8.
4. Nakazawa H, Watanabe Y, Morita O, Edo M, Yushima M, Yonezawa E. Electromagnetic micro-parts conveyer with coil-diode modules. In: Proceeding of IEEE international conference of solid-state sensors and actuators "Transducers '99", Miyazaki, Japan; 1999. p. 1192-5.
5. Liu C, Tasao T, Tai YC, Liu W, Will P, Ho CM. A micromachined permalloy magnetic actuator array for micro robotics assembly systems. In: Proceeding of IEEE international conference of solid-state sensors and actuators "Transducers '95", Stockholm, Sweden; 1995. p. 328-31.
6. M. Komori, and T. Hirakawa A magnetically driven linear microactuator with new driving method IEEE/ASME Trans Mech 10 3 2005 335 338
7. Böhringer KF, Donald BR, MacDonald NC. Single-crystal silicon actuator arrays for micro-manipulation tasks. In: Proceeding of IEEE workshop on micro electro mechanical systems, San Diego (CA); 1996. p. 7-12.
8. Furuhata T, Hirano T, Fujita H. Array-driven ultrasonic microactuators-arrayed microactuator modules that have swing pins. In: Proceeding of IEEE international conference of solid-state sensors and actuators "Transducers '91", San Francisco (CA); 1991. p. 1056-9.
9. Racine GA, Luthier R, de Rooij NF. Hybrid ultrasonic micromachined motors. In: Proceeding of IEEE workshop on micro electro mechanical systems, Fort Lauderdale (FL), 1993. p. 128-32.
10. Udayakumar KR, Bart SF, Flynn AM, Chen J, Tavrow LS, Cross LE, et al. Ferroelectric thin film ultrasonic micromotors. In: Proceeding of IEEE workshop on micro electro mechanical systems, Nara, Japan; 1991. p. 109-13.
11. M. Ataka, A. Omodaka, N. Takeshima, and H. Fujita Fabrication and operation of polyimide bimorph actuators for ancillary motion system J Microelectromech Syst 6 4 1993 146 150
12. Ataka M, Omodaka A, Fujita H. A biometric microsystem: a ciliary motion system. In: Digest of technical papers from the international conference on solid state sensors and actuators "Transducers '93", Yokohama, Japan; 1993. p. 38-41.
13. J.W. Suh, S.F. Glander, R.B. Darling, C.W. Storment, and G.T.A. Kovacs Organic thermal and electrostatic ciliary microactuator array for object manipulation Sens Actuators A 58 1 1997 51 60
14. Y. Fukuta, Y.A. Chapuis, Y. Mita, and H. Fujita Design, fabrication, and control of MEMS-Based actuator arrays for air-flow distributed micromanipulation J Microelectromech Syst 15 4 2006 912 926
15. S. Konishi, and H. Fujita A conveyance system using air flow based on distributed micro motion systems J Microelectromech Syst 3 2 1994 54 58
16. Mita Y, Konishi S, Fujita H. Two dimensional micro conveyance system with through holes for electrical and fluidic interconnect ion. In: Proceeding of IEEE international conference of solid-state sensors and actuators "Transducers '97, Chicago (IL); 1997. p. 37-40.
17. Hirata T, Akashi T, Bertholds A, Gruber HP, Schmid A, Gretillat MA, et al. A novel pneumatic actuator system realised by microelectro-discharge machining. in: Proceeding of IEEE workshop on micro electro mechanical systems "MEMS'98", Heidelberg, Germany; 1998. p. 160-5.
18. K. Salonitis, A. Stournaras, G. Tsoukantas, P. Stavropoulos, and G. Chryssolouris "A theoretical and experimental investigation on limitations of pulsed laser drilling" J Mater Process Technol 183 2007 96 103
19. J.H. Kim, J.-H. Boo, and Y.-J. Kim Effect of stage control parameters on the fib milling process Thin Solid Films 516 2008 6710 6714
20. Yahiaoui Réda, Zeggari Rabah, Malapert Julien, Manceau Jean-François. A new two-dimensional actuator for air flow micro-manipulation. First workshop on hardware and software implementation and control of distributed MEMS, DMEMS; 2010. p. 11-15. doi: 10.1109/dMEMS.2010.8.
21. Mita Yoshio, Arai Makoto, Tixier Agnes, Fujita Hiroyuki, Bulk micromachined durable air-flow microactuator array for robust conveyance systems. (TRANSDUCERS '01/EUROSENSORS XV), Munich Germany; (vol. 1), 10-14 June, 2001. p. 718-21.
22. Malapert Julien, Yahiaoui Réda, Zeggari Rabah, Manceau Jean-François. Tilted micro air jet for ow control. In: European COMSOL conference, Milan; 2009.
23. Michaël De Volder, and Dominiek Reynaerts Pneumatic and hydraulic microactuators: a review J Micromech Microeng 20 4 2010