The effect of boron doping level on the morphology and structure of ultra/nanocrystalline diamond films

Chemical Vapor Deposition

Volumn 18, Issue 4-6, 2012, Pages 159-165

  Souza, Fernando A ^a   Azevedo, Adriana F ^a   Giles, Carlos ^b   Saito, Eduardo ^a   Baldan, Maurício R ^a   Ferreira, Neidenêi G ^a  

^a INSTITUTO NACIONAL DE PESQUISAS ESPACIAIS   (Brazil)

^b UNIVERSITY OF CAMPINAS   (Brazil)

Author keywords

AFM; Doped diamond films; Mott Schottky; Nanocrystalline; Ultra nanocrystalline; XRD

Indexed keywords

AFM; DOPED-DIAMOND FILMS; MOTT-SCHOTTKY; NANOCRYSTALLINES; XRD;

DIAMOND FILMS; GAS MIXTURES; GRAIN SIZE AND SHAPE; METHANOL; MORPHOLOGY; SCANNING ELECTRON MICROSCOPY; X RAY DIFFRACTION;

SEMICONDUCTOR DOPING;

EID: 84862122178     PISSN: 09481907     EISSN: 15213862     Source Type: Journal    
DOI: 10.1002/cvde.201106953     Document Type: Article

References (27)

1. O. A. Williams, M. Daenena, J. D'Haen, K. Haenen, J. Maes, V. V. Moshchalkov, M. Nesládek, D. M. Gruen, Diamond Relat. Mater. 2006, 15, 654.
2. O. A. Williams, M. Nesladek, M. Daenen, S. Michaelson, A. Hoffman, E. Osawa, K. Haenen, R. B. Jackman, Diamond Relat. Mater. 2008, 17, 1080.
3. J. E. Butler, A. V. Sumant, Chem. Vap. Deposition 2008, 14, 145.
4. S. Wang, V. M. Swope, J. E. Butler, T. Feygelson, G. M. Swain, Diamond Relat. Mater. 2009, 18, 669.
5. P. Zapol, M. Sternberg, L. A. Curtiss, T. Frauenheim, D. M. Gruen, Phys. Rev. B 2002, 65, 045403.
6. P. Achatz, O. A. Williams, P. Bruno, D. M. Gruen, J. A. Garrido, M. Stutzmann, Phys. Rev. B 2006, 74, 155429.
7. W. Gajewski, P. Achatz, O. A. Williams, K. Haenen, E. Bustarret, M. Stutzmann, J. A. Garrido, Phys. Rev. B 2009, 79, 045206.
8. T. Lin, G. Y. Yu, A. T. S. Wee, Z. X. Shen, K. P. Loha, Appl. Phys. Lett. 2000, 77, 2692.
9. P. W. May, J. A. Smith, Y. A. Mankelevich, Diamond Relat. Mater. 2006, 15, 345.
10. P. W. May, Y. A. Mankelevich, J. Phys. Chem. C 2008, 112, 12432.
11. J. Cifre, J. Puigdollers, M. C. Polo, J. Esteve, Diamond Relat. Mater. 1994, 3, 628.
12. R. Issaoui, J. Achard, F. Silva, A. Tallaire, V. Mille, A. Gicquel, Phys. Status Solidi A 2011, 208, 2023.
13. D. Das, R. N. Singh, I. T. Barney, A. G. Jackson, S. M. Mukhopadhyay, J. Vac. Sci. Technol. A 2008, 26, 1487.
14. C. Lévy-Clément, N. A. Ndao, A. Katty, M. Bernard, A. Deneuville, C. Comninellis, A. Fujishima, Diamond Relat. Mater. 2003, 12, 606.
15. H. Li, T. Zhang, L. Li, X. Lü, B. Li, Z. Jin, G. Zou, J. Cryst. Growth 2010, 312, 1986.
16. A. C. Ferrari, J. Robertson, Philos. Trans. R. Soc. London A 2004, 362, 2477.
17. A. C. Ferrari, J. Robertson, Phys. Rev. B 2001, 64, 075414 (13 pages).
18. S. Prawer, R. J. Nemanich, Philos. Trans. R. Soc. London A 2004, 362, 2537.
19. M. Bernard, A. Deneuville, P. Muret, Diamond Relat. Mater. 2004, 13, 282.
20. P. W. May, W. J. Ludlow, M. Hannaway, P. J. Heard, J. A. Smith, K. N. Rosser, Diamond Relat. Mater. 2008, 17, 105.
21. Y. V. Pleskov, Russ. J. Electrochem. 2002, 38, 1275.
22. A. F. Azevedo, S. C. Ramos, M. R. Baldan, N. G. Ferreira, Diamond Relat. Mater. 2008, 17, 1137.
23. M. S. Haque, H. A. Naseem, A. P. Malshe, W. D. Brown, Chem. Vap. Deposition 1997, 3, 129.
24. A. Van der Drift, Philos. Res. Rep. 1967, 22, 267.
25. F. Silva, F. Bénédic, P. Bruno, A. Gicquel, Diamond Relat. Mater. 2005, 14, 398.
26. G. Cicala, P. Bruno, F. Bénédic, F. Silva, K. Hassouni, G. S. Senesi, Diamond Relat. Mater. 2005, 14, 421.
27. K. L. Ma, W. J. Zhang, Y. S. Zou, Y. M. Chong, K. M. Leung, I. Bello, S. T. Lee, Diamond Relat. Mater. 2006, 15, 626.