SCOPUS 정보 검색 플랫폼

Volumn 37, Issue 10, 2012, Pages 1628-1630

Ultra-high efficiency multilayer blazed gratings through deposition kinetic control

Author keywords

[No Author keywords available]

Indexed keywords

BLAZED GRATING; DEPOSITION KINETICS; GROOVE PROFILE; MO/SI MULTILAYER; MULTILAYER INTERFACE; SPUTTERING GAS PRESSURE; ULTRA-HIGH;

DIFFRACTION EFFICIENCY; INTERFACES (MATERIALS); OPTIMIZATION;

MULTILAYERS;

EID: 84862105459 PISSN: 01469592 EISSN: 15394794 Source Type: Journal
DOI: 10.1364/OL.37.001628 Document Type: Article

Times cited : (25)

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