Nanocrystalline-to-amorphous transition in nanolaminates grown by low temperature atomic layer deposition and related mechanical properties

Applied Physics Letters

Volumn 100, Issue 19, 2012, Pages

  Raghavan, R ^a   Bechelany, M ^b   Parlinska, M ^a   Frey, D ^a   Mook, W M ^a,d   Beyer, A ^c   Michler, J ^a   Utke, I ^a  

^a SWISS FEDERAL LABORATORIES FOR MATERIALS SCIENCE AND TECHNOLOGY   (Switzerland)

^b INSTITUT CHARLES GERHARDT   (France)

^c BIELEFELD UNIVERSITY   (Germany)

^d LOS ALAMOS NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BI-LAYER; BILAYER THICKNESS; GRAIN SIZE EFFECT; INVERSE HALL-PETCH; LOW TEMPERATURES; NANO-LAMINATES; NANOCRYSTAL SIZES; NANOCRYSTALLINES; NANOLAMINATE STRUCTURES; SINGLE LAYER; SOFTENING MECHANISMS; STRUCTURAL CHANGE; ZNO;

MECHANICAL PROPERTIES; NANOINDENTATION; ZINC OXIDE;

ATOMIC LAYER DEPOSITION;

EID: 84862059636     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4711767     Document Type: Article

References (38)

1. S. M. George, Chem. Rev. 110 (1), 111 (2010). 10.1021/cr900056b
2. M. Knez, K. Niesch, and L. Niinisto, Adv. Mater. 19 (21), 3425 (2007). 10.1002/adma.200700079
3. D. M. King, S. I. Johnson, J. H. Li, X. H. Du, X. H. Liang, and A. W. Weimer, Nanotechnology 20 (19), 195401 (2009). 10.1088/0957-4484/20/19/195401
4. C. Marichy, M. Bechelany, and N. Pinna, Adv. Mater. 24, 1017 (2012); 10.1002/adma.201104129
5. H. Kim, H. B. R. Lee, and W. J. Maeng, Thin Solid Films 517 (8), 2563 (2009). 10.1016/j.tsf.2008.09.007
6. M. Knez, A. Kadri, C. Wege, U. Gosele, H. Jeske, and K. Nielsch, Nano Lett. 6 (6), 1172 (2006). 10.1021/nl060413j
7. S. M. Lee, E. Pippel, U. Gosele, C. Dresbach, Y. Qin, C. V. Chandran, T. Brauniger, G. Hause, and M. Knez, Science 324 (5926), 488 (2009). 10.1126/science.1168162
8. M. D. Groner, F. H. Fabreguette, J. W. Elam, and S. M. George, Chem. Mater. 16 (4), 639 (2004). 10.1021/cm0304546
9. V. L. A. Paracchino, K. Sivula, M. Grätzel, and E. Thimsen, Nature Mater. 10, 456 (2011). 10.1038/nmat3017
10. J. Elias, M. Bechelany, I. Utke, R. Erni, D. Hosseini, J. Michler, and L. Philippe, Urchin-inspired zinc oxide as building blocks for nanostructured solar cells., Nanoscale (Submitted).
11. D. Bhattacharyya, N. A. Mara, P. Dickerson, R. G. Hoagland, and A. Misra, Philos. Mag. 90 (13), 1711 (2010); 10.1080/14786430903459691
12. K. A. Rzepiejewska-Malyska, W. M. Mook, M. Parlinksa-Wojtan, J. Hejduk, and J. Michler, J. Mater. Res. 24 (3), 1208 (2009); 10.1557/jmr.2009.0139
13. M. A. Phillips, B. M. Clemens, and W. D. Nix, Acta Mater. 51 (11), 3171 (2003); 10.1016/S1359-6454(03)00128-9
14. U. Helmersson, S. Todorova, S. A. Barnett, J. E. Sundgren, L. C. Markert, and J. E. Greene, J. Appl. Phys. 62 (2), 481 (1987); 10.1063/1.339770
15. M. Shinn, L. Hultman, and S. A. Barnett, J. Mater. Res. 7 (4), 901 (1992); 10.1557/JMR.1992.0901
16. X. Chu and S. A. Barnett, J. Appl. Phys. 77 (9), 4403 (1995); 10.1063/1.359467
17. P. H. Mayrhofer, C. Mitterer, L. Hultman, and H. Clemens, Prog. Mater. Sci. 51 (8), 1032 (2006); 10.1016/j.pmatsci.2006.02.002
18. S. C. Tjong and H. Chen, Mater. Sci. Eng. R 45 (1-2), 1 (2004); 10.1016/j.mser.2004.07.001
19. J. S. Koehler, Phys. Rev. B 2 (2), 547 (1970). 10.1103/PhysRevB.2.547
20. S. Veprek and A. S. Argon, Surf. Coat. Technol. 146-147 (0), 175 (2001); 10.1016/S0257-8972(01)01467-0
21. S. Veprek, S. Reiprich, and S. H. Li, Appl. Phys. Lett. 66 (20), 2640 (1995). 10.1063/1.113110
22. S. Y. Kuan, X. H. Du, H. S. Chou, and J. C. Huang, Surf. Coat. Technol. 206 (6), 1116 (2011). 10.1016/j.surfcoat.2011.07.093
23. H. Cheun, C. Fuentes-Hernandez, J. Shim, Y. Fang, Y. Cai, H. Li, A. K. Sigdel, J. Meyer, J. Maibach, A. Dindar, Y. Zhou, J. J. Berry, J.-L. Bredas, A. Kahn, K. H. Sandhage, and B. Kippelen, Adv. Funct. Mater. 22 (7), 1531 (2012). 10.1002/adfm.201102968
24. Y. Balcaen, N. Radutoiu, J. Alexis, J. D. Beguin, L. Lacroix, D. Samélor, and C. Vahlas, Surf. Coat. Technol. 206 (7), 1684 (2011); 10.1016/j.surfcoat.2011.09.056
25. R. Katamreddy, R. Inman, G. Jursich, A. Soulet, A. Nicholls, and C. Takoudis, Thin Solid Films 515 (17), 6931 (1986). 10.1016/j.tsf.2007.02.001
26. J. A. Whitby, F. Oestlund, P. Horvath, M. Gabureac, J. L. Riesterer, I. Utke, M. Hohl, L. Sedlacek, J. Jiruse, V. Friedli, M. Bechelany, and J. Michler, Adv. Mater. Sci. Eng. 2012, 180437. 10.1155/2012/180437
27. E. Voce and D. Tabor, J. Inst. Metals 79 (12), 465 (1951).
28. W. Sylwestrowicz and E. O. Hall, Proc. Phys. Soc. London, Sect. B 64 (378), 495 (1951); 10.1088/0370-1301/64/6/305
29. N. J. Petch, J. Iron Steel Inst., London 174 (1), 25 (1953).
30. A. H. Chokshi, A. Rosen, J. Karch, and H. Gleiter, Scr. Metall. 23 (10), 1679 (1989); 10.1016/0036-9748(89)90342-6
31. P. G. Sanders, J. A. Eastman, and J. R. Weertman, Acta Mater. 45 (10), 4019 (1997); 10.1016/S1359-6454(97)00092-X
32. E. Arzt, Acta Mater. 46 (16), 5611 (1998); 10.1016/S1359-6454(98)00231-6
33. H. Gleiter, Acta Mater. 48 (1), 1 (2000); 10.1016/S1359-6454(99)00285-2
34. K. S. Kumar, H. Van Swygenhoven, and S. Suresh, Acta Mater. 51 (19), 5743 (2003). 10.1016/j.actamat.2003.08.032
35. K. A. Padmanabhan, J. Mater. Sci. 44 (9), 2226 (2009); 10.1007/s10853-008-3076-1
36. J. H. Lee, I. Kim, D. M. Hulbert, D. Jiang, A. K. Mukherjee, X. Zhang, and H. Wang, Acta Mater. 58 (14), 4891 (2010). 10.1016/j.actamat.2010.05.027
37. See supplementary material at http://dx.doi.org/10.1063/1.4711767 E-APPLAB-100-091219 for more information about the scanning electron and ion microscopy observations, the indentation experiments, and the experimental section details.
38. J. Elias, C. Levy-Clement, M. Bechelany, J. Michler, G. Y. Wang, Z. Wang, and L. Philippe, Adv. Mater. 22 (14), 1607 (2010). 10.1002/adma.200903098