Three-dimensional spherical shell resonator gyroscope fabricated using wafer-scale glassblowing

Journal of Microelectromechanical Systems

Volumn 21, Issue 3, 2012, Pages 509-510

  Zotov, Sergei A ^a   Trusov, Alexander A ^a   Shkel, Andrei M ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

3 D microelectromechanical systems (MEMS) spherical shell; Glassblowing; gyroscope

Indexed keywords

CORIOLIS VIBRATORY GYROSCOPES; DETECTION ELECTRODE; DRIVE MODE; EXPERIMENTAL CHARACTERIZATION; EXPERIMENTAL SETUP; GLASS-BLOWING; ISOTROPIC SHELLS; METAL ELECTRODES; NEW DEVICES; SENSE MODE; SPHERICAL SHELL; WAFER-SCALE; WIDE-LINEAR RANGE;

ELECTRODES; ELECTROMECHANICAL DEVICES; ENERGY TRANSFER; MECHATRONICS; MEMS; MICROMECHANICS; RESONATORS; SHELLS (STRUCTURES); SPHERES; THREE DIMENSIONAL;

GYROSCOPES;

EID: 84861880784     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2012.2189364     Document Type: Article

References (7)

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