3-D micromachined hemispherical shell resonators with integrated capacitive transducers

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2012, Pages 168-171

  Sorenson, L D ^a   Gao, X ^a   Ayazi, F ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

A-CENTER; ANCHOR LOSS; AXISYMMETRY; CAPACITIVE TRANSDUCERS; FABRICATION METHOD; IN-VACUUM; INERTIAL NAVIGATIONS; MICRO-SCALES; MICROMACHINED; RESONANCE MODE; SELF ALIGNED PROCESS; SELF-ALIGNED; THREEDIMENSIONAL (3-D);

MEMS; POLYSILICON; SHELLS (STRUCTURES); THREE DIMENSIONAL; TRANSDUCERS;

RESONATORS;

EID: 84860430343     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2012.6170120     Document Type: Conference Paper

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