3D-SOULE: A fabrication process for large scale integration and micromachining of spherical structures

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2011, Pages 45-48

  Visvanathan, Karthik ^a   Li, Tao ^a   Gianchandani, Yogesh B ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION PROCESS; FUSED QUARTZ; GLASS SPHERES; LARGE SCALE INTEGRATION; MACHINING RATE; MICRO ELECTRO-DISCHARGE MACHINING; SPHERICAL STRUCTURES; TOOL WEAR; ULTRASONIC MACHINING;

COMPOSITE MICROMECHANICS; GLASS; MECHANICAL ENGINEERING; MECHANICS; MEMS; MICROMACHINING; QUARTZ; REACTIVE ION ETCHING; SPHERES; THREE DIMENSIONAL; ULTRASONIC CUTTING;

STAINLESS STEEL;

EID: 79953785878     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2011.5734358     Document Type: Conference Paper

References (12)

1. A. Matthews, and F.J. Rybak, "Comparison of hemispherical resonator gyros and optical gyros," IEEE Aerospace and Electronic Systems Magazine, 7, pp. 40-46, 1992.
2. A.M. Shkel, C. Acar and C. Painter, "Two types of micromachined vibratory gyroscopes," IEEE Sensors, pp. 531-536, 2005.
3. E. A. Izmailov, M. M. Kolesnik, A. M. Osipov and A. V. Akimov, "Hemispherical resonator gyro technology. Problems and possible ways of their solutions," RTO SCI International Conference on Integrated Navigation Systems, 1999.
4. E. W. Becker, W. Ehrfeld, P. Hagmann, A. Maner and D. Munchmeyer, "Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic molding," Microelectronic Engineering, 4, pp. 35-56, 1986. (Pubitemid 16587242)
5. H. Guckel, "High-aspect-ratio micromachining via deep X-ray lithography," Proceedings of the IEEE, 86, pp. 1586-1593, 1998. (Pubitemid 128720265)
6. Robert Bosch GmbH, U.S. Pat. 4855017, U.S. Pat. 4784720, 1994.
7. T.K.A. Chou and K. Najafi, "Fabrication of out of plane curved surfaces in Si by utilizing RIE lag," IEEE International Conference on Micro Electro Mechanical Systems, pp. 145-148, 2002. (Pubitemid 34216244)
8. K.D. Wise, M.G. Robinson, and W.J. Hillegas, "Solid-state process to produce hemispherical components for internal fusion targets," Journal of Vacuum Science Technology, 16, pp. 1179-1182, 1981. (Pubitemid 12455826)
9. M. Zalalutdinov, K.L. Aubin, R.B. Reichenbach, A.T. Zehnder, B. Houston, J. M. Parpia and H. G. Craighead, "Shell type micromechanical actuator and resonator," Applied Physics Letters, 83, pp. 3815-3817, 2003.
10. E.J. Eklund and A.M. Shkel, "Glass blowing on a wafer level," Journal of Microelectromechanical Systems, 16, pp. 232-239, 2007. (Pubitemid 46564199)
11. T. Li and Y.B. Gianchandani, "A micromachining process for die-scale pattern transfer in ceramics and its application to bulk piezoelectric actuators," Journal of Microelectromechanical Systems, 15, pp. 605-612, 2006. (Pubitemid 43891356)
12. T. Li and Y.B. Gianchandani, "A high speed batch mode ultrasonic machining technology for multi-level quartz crystal microstructures," IEEE International Conference on Micro Electro Mechanical Systems, pp. 398-401, 2010.