Performance increase in turbomolecular pumps with curved type blades

Vacuum

Volumn 86, Issue 11, 2012, Pages 1764-1769

  Sengil, Nevsan ^a  

^a UNIVERSITY OF TURKISH AERONAUTICAL ASSOCIATION   (Turkey)

Author keywords

Compression ratio; Curved blades; DSMC; Flat blades; Pumping speed; Turbomolecular pump

Indexed keywords

CURVED BLADES; DSMC; FLAT BLADES; PUMPING SPEED; TURBO MOLECULAR PUMPS;

COMPRESSION RATIO (MACHINERY); PUMPS; STATORS;

ROTORS (WINDINGS);

EID: 84861857410     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2011.12.018     Document Type: Article

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