A continuum model for pumping performance of turbomolecular pumps in all flow regimes

Vacuum

Volumn 75, Issue 4, 2004, Pages 361-366

  Amoli, A ^a   Hosseinalipour, S M ^a  

^a IRAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Iran)

Author keywords

Couette Poiseuille flow; Free molecular flow; Slip flow; Turbomolecular pump

Indexed keywords

BOUNDARY CONDITIONS; COMPUTER SIMULATION; CONTINUUM MECHANICS; DISCHARGE (FLUID MECHANICS); MATHEMATICAL MODELS; MONTE CARLO METHODS; ROTORS; STATORS;

COUETTE-POISEUILLE FLOW; FREE MOLECULAR FLOW; SLIP FLOW; TURBOMOLECULAR PUMP;

VACUUM PUMPS;

EID: 3142707422     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2004.04.006     Document Type: Article

References (12)

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