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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 29, Issue 1, 2011, Pages

Effect of inlet guide vanes and sharp blades on the performance of a turbomolecular pump

(1) Bird, G A a

a GAB Consulting Pty Ltd (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ADVERSE EFFECT; COMPRESSION RATIOS; CONVENTIONAL PUMPS; DIMENSIONAL REPRESENTATION; DIRECT SIMULATION MONTE CARLO METHOD; FLOWTHROUGH; FREE MOLECULE FLOW; INLET GUIDE VANE; LEADING EDGE; TURBO MOLECULAR PUMPS; VACUUM CHAMBERS;

COMPRESSION RATIO (MACHINERY); COMPUTER SIMULATION; MONTE CARLO METHODS; ROTORS; WAKES;

PUMPS;

EID: 79952032965 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.3521313 Document Type: Article

Times cited : (8)

References (8)

1
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- (1994) Molecular Gas Dynamics and the Direct Simulation of Gas Flows , pp. 450
- Bird, G.A.¹

2
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- DSMC calculations of blade rows of a turbomolecular pump in the molecular and transition flow regions
- DOI 10.1016/S0042-207X(99)00181-5
- J. -S. Heo and Y. -K. Huang, Vacuum VACUAV 0042-207X 56, 133 (2000). 10.1016/S0042-207X(99)00181-5 (Pubitemid 30555864)
- (2000) Vacuum , vol.56 , Issue.2 , pp. 133-142
- Heo, J.-S.¹ Hwang, Y.-K.²

3
- 28544437104
- The pumping performances of the turbomoleculae pump simulated by direct simulation monte carlo method
- DOI 10.1016/j.pnucene.2005.05.070, PII S0149197005001216
- S. Wang and H. Ninokata, Prog. Nucl. Energy PNENDE 0149-1970 47, 664 (2005). 10.1016/j.pnucene.2005.05.070 (Pubitemid 41743275)
- (2005) Progress in Nuclear Energy , vol.47 , Issue.1-4 , pp. 664-671
- Wang, S.¹ Ninokata, H.²

4
- 65549099769
- JVTAD6 0734-2101. 10.1116/1.3119668
- R. Versluis, R. Dorsman, L. Thielen, and M. E. Roos, J. Vac. Sci. Technol. A JVTAD6 0734-2101 27, 543 (2009). 10.1116/1.3119668
- (2009) J. Vac. Sci. Technol. A , vol.27 , pp. 543
- Versluis, R.¹ Dorsman, R.² Thielen, L.³ Roos, M.E.⁴

5
- 79952009808
- Pacific Grove, CA
- F. Shapirov, 27th Symposium on Rarefied Gas Dynamics, Pacific Grove, CA (unpublished).
- 27th Symposium on Rarefied Gas Dynamics
- Shapirov, F.¹

6
- 63849150740
- edited by M. S. Ivanov and A. K. Rebrov (Publishing House of the Siberian Branch of the Russian Academy of Sciences, Novosibirsk, Russia)
- G. A. Bird, in Rarefied Gas Dynamics, edited by, M. S. Ivanov, and, A. K. Rebrov, (Publishing House of the Siberian Branch of the Russian Academy of Sciences, Novosibirsk, Russia, 2007), p. 349.
- (2007) Rarefied Gas Dynamics , pp. 349
- Bird, G.A.¹

7
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- JCTPAH 0021-9991. 10.1016/j.jc2009.03.021
- M. A. Gallis, J. R. Torczynski, D. J. Rader, and G. A. Bird, J. Comput. Phys. JCTPAH 0021-9991 228, 4532 (2009). 10.1016/j.jcp.2009.03.021
- (2009) J. Comput. Phys. , vol.228 , pp. 4532
- Gallis, M.A.¹ Torczynski, J.R.² Rader, D.J.³ Bird, G.A.⁴

8
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- APCPCS 0094-243X.
- G. A. Bird, AIP Conf. Proc. APCPCS 0094-243X 762, 541 (2005).
- (2005) AIP Conf. Proc. , vol.762 , pp. 541
- Bird, G.A.¹

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