Direct simulation of pumping characteristics in a fully 3D model of a single-stage turbomolecular pump

Applied Surface Science

Volumn 169-170, Issue , 2001, Pages 772-776

  Chang, Yu Wen ^a   Jou, Rong Yuan ^a  

^a INSTRUMENT TECHNOLOGY RESEARCH CENTER   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; MATHEMATICAL MODELS; MONTE CARLO METHODS; TURBINE PUMPS;

TURBOMOLECULAR PUMP;

VACUUM PUMPS;

EID: 17344376850     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(00)00789-3     Document Type: Article

References (8)

1. C.H. Kruger, Ph.D. Thesis, Massachusetts Institute of Technology, 1960.
2. T. Sawada, et al., The Axial Flow Molecular Pump, Ist Report, On a Rotor with a Single Blade Row, Bull. JSME 62 (2) (1968).
3. T. Sawada, et al., The Axial Flow Molecular Pump, 2nd Report, The Performance of a Combination of Blade Rows, Bull. JSME 11 (67) (1971).
4. T. Sawada, O. Taniguchi, The Axial Flow Molecular Pump, 3rd Report, Trial Manufacture and Performance Test, Bull. JSME 16 (92) (1973).
5. T. Sawada, The Axial Flow Molecular Pump, 4th Report, Performance of a Rotor with a Single Blade Row in the Transition Flow Regime, Bull. JSME 16 (96) (1973).
6. J.G. Chu, Z.Y. Hua, The statistical theory of turbomolecular pumps, J. Vac. Sci. Technol. A 20 (4) (1982).
7. S. Katsimichas, et al., General geometry calculations of one-stage molecular flow transmission probabilities for turbomolecular pumps, J. Vac. Sci. Technol. A 13 (6) (1995).
8. G.A. Bird, Molecular Gas Dynamics and the Direct Simulation of Gas Flows, Clarendon Press, Oxford, 1994.