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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 28, Issue 6, 2010, Pages 1312-1315

Numerical simulation of turbomolecular pump over a wide range of gas rarefaction

(1) Sharipov, Felix a,b

a KARLSRUHE INSTITUTE OF TECHNOLOGY (Germany)

b FEDERAL UNIVERSITY OF PARANÁ (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

COMPRESSION RATIOS; GAS FLOWS; HYDRODYNAMIC REGIME; MAIN CHARACTERISTICS; NUMERICAL SIMULATION; PUMP CHARACTERISTICS; PUMPING SPEED; ROTOR SPEED; TURBO MOLECULAR PUMPS;

COMPRESSION RATIO (MACHINERY); FLUID DYNAMICS; HYDRODYNAMICS; MONTE CARLO METHODS; SPEED;

PUMPS;

EID: 78149463008 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.3484139 Document Type: Article

Times cited : (16)

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