Numerical investigation of turbomolecular pumps using the direct simulation Monte Carlo method with moving surfaces

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 27, Issue 3, 2009, Pages 543-547

  Versluis, R ^a   Dorsman, R ^a   Thielen, L ^a   Roos, M E ^a  

^a TNO   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

DIRECT SIMULATION MONTE CARLO; DIRECT SIMULATION MONTE CARLO METHODS; GAS FLOWS; MOVING SURFACES; NEW APPROACHES; NUMERICAL INVESTIGATIONS; TRANSITIONAL FLOW REGIMES; TURBO MOLECULAR PUMPS;

FLOW SIMULATION; MONTE CARLO METHODS; PUMPS;

DIRECT NUMERICAL SIMULATION;

EID: 65549099769     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3119668     Document Type: Article

References (13)

1. C. H. Kruger, " The axial-flow compressor in the free-molecule range.," Ph.D. thesis, Massachusetts Institute of Technology, 1960.
2. T. Sawada, M. Suzuki, and O. Taniguchi, Sci. Pap. Inst. Phys. Chem. Res. (Jpn.) 62, 49 (1968).
3. T. Sawada, M. Suzuki, and O. Taniguchi, Bull. JSME 14, 48 (1971).
4. T. Sawada, Bull. JSME 16, 993 (1973).
5. T. Sawada, Bull. JSME 22, 362 (1979).
6. A. Amoli, R. Ebrahimi, and S. M. Hosseinalipour, Vacuum 72, 427 (2004). 10.1016/j.vacuum.2003.10.002
7. A. Amoli and S. M. Hosseinalipour, Vacuum 75, 361 (2004). 10.1016/j.vacuum.2004.04.006
8. J.-S. Heo and Y.-K. Hwang, Vacuum 56, 133 (2000). 10.1016/S0042-207X(99) 00181-5
9. S. Wang and H. Ninokata, Prog. Nucl. Energy 47, 664 (2005). 10.1016/j.pnucene.2005.05.070
10. O. B. Malyshev, Vacuum 81, 752 (2007). 10.1016/j.vacuum.2005.11.055
11. G. Voss, J. Phys.: Conf. Ser. 114, 012018 (2008). 10.1088/1742-6596/114/ 1/012018
12. GTM-X user manual, Version 4.3, TNO Science and Industry, The Netherlands.
13. G. A. Bird, Molecular Gas Dynamics and the Direct Simulation of Gas Flows (Clarendon, Oxford, 1994).