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Volumn 406, Issue 1-2, 2002, Pages 190-194
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Atomic force microscopy study of the morphological shape of thin film buckling
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Author keywords
Atomic force microscopy; Buckling patterns; Thin films
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
BUCKLING;
COMPRESSIVE STRESS;
DELAMINATION;
MORPHOLOGY;
SPUTTERING;
STRESS ANALYSIS;
INTERNAL STRESSES;
THIN FILMS;
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EID: 0037051238
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/S0040-6090(01)01772-2 Document Type: Article |
Times cited : (48)
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References (34)
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