Influence of the substrate temperature on the structure and the optical properties of amorphous Si:H thin films prepared by reactive evaporation

Thin Solid Films

Volumn 403-404, Issue , 2002, Pages 153-156

  Rinnert, H ^a   Vergnat, M ^a  

^a INSTITUT JEAN LAMOUR   (France)

Author keywords

Hydrogenated amorphous silicon; Infrared spectrometry; Photoconductivity; Reactive evaporation; Thermal desorption spectrometry

Indexed keywords

AMORPHOUS SILICON; DESORPTION; EVAPORATION; HYDROGEN; ION BEAMS; PHOTOCONDUCTIVITY; PLASMA SOURCES; REFRACTIVE INDEX; SILANES; SUBSTRATES;

THERMAL DESORPTION SPECTROMETRY;

THIN FILMS;

EID: 0036468069     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(01)01643-1     Document Type: Conference Paper

References (8)