On the bending strength of fused silica flexures fabricated by ultrafast lasers [invited]

Optical Materials Express

Volumn 1, Issue 5, 2011, Pages 816-831

  Bellouard, Yves ^a  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ABLATION THRESHOLDS; CHEMICAL ETCHING; HIGH-STRENGTH; MECHANICAL DEVICE; MONOLITHICALLY INTEGRATED; OPTOMECHANICAL; TWO-STEP PROCESS;

BENDING STRENGTH; MECHANICAL PROPERTIES; MONOLITHIC INTEGRATED CIRCUITS; ULTRASHORT PULSES;

ULTRAFAST LASERS;

EID: 84861677236     PISSN: None     EISSN: 21593930     Source Type: Journal    
DOI: 10.1364/OME.1.000816     Document Type: Article

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