Development of a middle-range six-degrees-of-freedom system

Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture

Volumn 224, Issue 4, 2010, Pages 679-688

  Jywe, W ^a   Jeng, Y R ^b   Liu, C H ^a   Teng, Y F ^b   Wu, C H ^c   Hsieh, T H ^a   Duan, L L ^a  

^a NATIONAL FORMOSA UNIVERSITY   (Taiwan)

^b NATIONAL CHUNG CHENG UNIVERSITY   (Taiwan)

^c NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

Flexure hinge; Nanometre stage; Piezoelectric; Positioning control; Stack type stage

Indexed keywords

ERRORS; FLEXIBLE STRUCTURES; HINGES; MEASUREMENTS;

FLEXURE HINGE; FOUR-DEGREES-OF-FREEDOM; LINEAR DISPLACEMENTS; MEASUREMENT SYSTEM; MEASURING SYSTEMS; NANOMETRES; PIEZOELECTRIC; POSITIONING CONTROL;

DEGREES OF FREEDOM (MECHANICS);

EID: 84861596591     PISSN: 09544054     EISSN: 20412975     Source Type: Journal    
DOI: 10.1243/09544054JEM1436     Document Type: Article

References (12)

1. Matey, J. R., Crandall, R. S., Brycki, B., and Briggs, G. A. D. Bimorph-driven x-y-z translation stage for scanned image microscopy. Rev. Sci. Instrum., 1987, 58, 567-570.
2. Heil, J., Bohm, A., Primke, M., and Wyder, P. Versatile three-dimensional cryogenic micropositioning device. Rev. Sci. Instrum., 1996, 67, 307-311.
3. Chang, S. H. and Du, B. C. A precision piezodriven micropositioner mechanism with large travel range. Rev. Sci. Instrum., 1988, 69, 1785-1791.
4. z piezo-micropositioner. Part I: design and analysis. IEEE Trans. Ultrason., Ferroelectr. Freq. Control, 1999, 46, 897-905.
5. z piezo-micropositioner. Part II: experiment and performance. IEEE Trans. Ultrason., Ferroelectr. Freq. Control, 1999, 46, 906-912.
6. Jywe, W. Y., Liu, C. H., and Teng, Y. F. Development of a flexure hinge-based stack-type 5 DOF nanometer-scale stage for a heavy-loading machining process. Proc. IMechE, Part B: J. Engineering Manufacture, 2006, 221(B3), 379-385. DOI: 10.1243/09544054JEM1487.
7. Jywe, W. Y., Jeng, Y. R., Teng, Y. F., Wu, C. H., Wang, H. S., and Chen, Y. J. A novel 5 DOF thin coplanar nanometer-scale stage. Precis. Engng, 2008, 32, 239-250.
8. Holmes, M., Hocken, R., and Trumper, D. The long-range scanning stage: a novel platform for scanned-probe microscopy. Precis. Engng, 2000, 24, 191-209.
9. Egashira, Y., Kosaka, K., Takada, S., Iwabuchi, T., Baba, T., Moriyama, S., Harada, T., Nagamoto, K., Nakada, A., Kubota, H., and Ohmi, T. 0.69nm resolution ultrasonic motor for large stroke precision stage. In Proceedings of IEEE NANO, 2001, pp. 397-402 (IEEE, Piscataway, New Jersey).
10. Shutov, M. V., Howard, D. L., Sandoz, E. E., Sirota, J. M., Smith, R. L., and Collins, S. D. Electrostatic inchworm microsystem with long range translation. Sens. Actuators A:, Phys., 2004, 114, 379-386.
11. Chu, C. L. and Fan, S. H. A novel long-travel piezoelectric-driven linear nanopositioning stage. Precis. Engng, 2006, 30, 85-95.
12. SIOS Me. β echnik GmbH, Catalog, available from http://www.sios.de.