Non-null full field X-ray mirror metrology using scots: A reflection deflectometry approach

Optics Express

Volumn 20, Issue 11, 2012, Pages 12393-12406

  Su, Peng ^a   Wang, Yuhao ^a   Burge, James H ^a   Kaznatcheev, Konstantine ^b   Idir, Mourad ^b  

^a UNIVERSITY OF ARIZONA   (United States)

^b BROOKHAVEN NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MIRRORS; OPTICAL TESTING;

DEFLECTOMETRY; FULL-FIELD; LATERAL RESOLUTION; MEASUREMENT TECHNIQUES; METROLOGY SYSTEMS; OPTICAL METROLOGY; OPTICAL TEST; SPHERICAL MIRROR; SURFACE SLOPE; UNIVERSITY OF ARIZONA; X RAY MIRRORS;

UNITS OF MEASUREMENT;

ARTICLE; COMPUTER AIDED DESIGN; COMPUTER SIMULATION; EQUIPMENT; EQUIPMENT DESIGN; INSTRUMENTATION; OPTICAL INSTRUMENTATION; RADIATION SCATTERING; REFRACTOMETRY; THEORETICAL MODEL; X RAY DIFFRACTION;

COMPUTER SIMULATION; COMPUTER-AIDED DESIGN; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; LENSES; MODELS, THEORETICAL; REFRACTOMETRY; SCATTERING, RADIATION; X-RAY DIFFRACTION;

EID: 84861492197     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.20.012393     Document Type: Article

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