Vision ray calibration for the quantitative geometric description of general imaging and projection optics in metrology

Applied Optics

Volumn 49, Issue 30, 2010, Pages 5851-5860

  Bothe, Thorsten ^a   Li, Wansong ^b   Schulte, Michael ^c   Von Kopylow, Christoph ^a   Bergmann, Ralf B ^a   Jüptner, Werner P O ^a  

^a BIAS BREMER INSTITUT FÜR ANGEWANDTE STRAHLTECHNIK GMBH   (Germany)

^b UNIVERSITY OF BREMEN   (Germany)

^c Advanced Optical Measurement and Automation (Adomea)   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

MOLECULAR PHYSICS; OPTICS;

CALIBRATION PROCESS; GEOMETRIC CALIBRATIONS; GEOMETRIC DESCRIPTION; HIGH SPATIAL FREQUENCY; METROLOGICAL APPLICATIONS; OPTICAL MAPPING SYSTEM; PROJECTION OPTICS; STATE OF THE ART;

CALIBRATION;

EID: 78149437630     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.49.005851     Document Type: Article

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