Software configurable optical test system: A computerized reverse Hartmann test

Applied Optics

Volumn 49, Issue 23, 2010, Pages 4404-4412

  Su, Peng ^a   Parks, Robert E ^a   Wang, Lirong ^a   Angel, Roger P ^a   Burge, James H ^a  

^a UNIVERSITY OF ARIZONA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTERFEROMETRY; PHASE SHIFT; SOFTWARE TESTING;

ASTRONOMICAL TELESCOPES; FRINGE REFLECTIONS; GENERAL SITUATION; HARTMANN-SHACK TEST; INTERFEROMETRIC METHODS; MEASUREMENT ACCURACY; PHASE SHIFTING METHODS; SOFTWARE-CONFIGURABLE;

OPTICAL TESTING;

EID: 77955866100     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.49.004404     Document Type: Article

References (31)

1. J. Ojeda-Castañeda, "Foucault, wire, and phase modulation tests," in Optical Shop Testing, 3rd ed., D. Malacara, ed., Wiley Series in Pure and Applied Optics (Wiley, 2007), pp. 275-316.
2. A. Cornejo-Rodriguez, "Ronchi test," in Optical Shop Testing, 3rd ed., D. Malacara, ed., Wiley Series in Pure and Applied Optics (Wiley, 2007), pp. 317-360.
3. D. Malacara-Doblado and I. Ghozeil, "Hartmann, Hartmann- Shack, and other screen tests," in Optical Shop Testing, 3rd ed., D. Malacara, ed., Wiley Series in Pure and Applied Optics (Wiley, 2007), pp. 361-397.
4. F. Ligtenberg, "The moire method, a new experimental method for the determination of moments in small slab models," Proc. Soc. Exp. Stress Anal. 12, 83-98 (1954).
5. R. Ritter and R. Hahn, "Contribution to analysis of the reflection grating method," Opt. Lasers Eng. 4, 13-24 (1983).
6. D. Perard and J. Beyerer, "Three-dimensional measurement of specular free-form surfaces with a structured-lighting reflection technique," Proc. SPIE 3204, 74-80 (1997).
7. R. Diaz-Uribe and M. Campos-García, "Null screen testing of fast convex aspheric surfaces," Appl. Opt. 39, 2670-2677 (2000).
8. J. Burke, T. Bothe, W. Osten, and C. Hess, "Reverse engineering by fringe projection," Proc. SPIE 4778, 312-324 (2002).
9. M. Knauer, J. Kaminski, and G. Hausler, "Phase measuring deflectometry: a new approach to measure specular free form surfaces," Proc. SPIE 5457, 366-376 (2004).
10. T. Bothe, W. Li, C. von Kopylow, and W. Jueptner, "Highresolution 3D shape measurement on specular surfaces by fringe reflection," Proc. SPIE 5457, 411-422 (2004).
11. Y. Surrel, "Absolute flatness measurement with 10nm resolution over a 400mm field," Proc. SPIE 6341, 634136 (2006).
12. W. Ju¨ptner and T. Bothe, "Sub-nanometer resolution for the inspection of reflective surfaces using white light," Proc. SPIE 7405, 740502 (2009).
13. For example, G. Haeusler M. Knauer, , and R. Lampalzer, "Method and apparatus for determining the shape and the local surface normals of specular surfaces," U.S. patent 7,532,333 (12 May 2009).
14. Ondulo from VISUOL Technologies, Metz, France, www .visuol.com.
15. CSP Services GmbH, QDec, www.cspservices.eu/files/ downloads/CSPServices- OptimizingSolarPower.pdf.
16. www.rehnu.com.
17. J. Weng, P. Cohen, and M. Herniou, "Camera calibration with distortion models and accuracy evaluation," IEEE Trans. Pattern Anal. Mach. Intell. 14, 965-980 (1992).
18. W. H. Southwell, "Wave-front estimation from wave-front slope measurements," J. Opt. Soc. Am. 70, 998-1006 (1980).
19. D. R. Neal, J. Copland, and D. Neal, "Shack-Hartmann wavefront sensor precision and accuracy," Proc. SPIE 4779, 148-160 (2002).
20. K. A. Winick, "Cramer-Rao lower bounds on the performance of charge-coupled-device optical position estimators," J. Opt. Soc. Am. A 3, 1809-1815 (1986).
21. W. Osten, W. Nadeborn, and P. Andrä, "General hierarchical approach in absolute phase measurement," Proc. SPIE 2860, 2-13 (1996).
22. J. M. Huntley and H. Saldner, "Temporal phase-unwrapping algorithm for automated interferogram analysis," Appl. Opt. 32, 3047-3052 (1993).
23. M. Petz and R. Tutsch, "Reflection grating photogrammetry: a technique for absolute shape measurement of specular freeform surfaces," Proc. SPIE 5869, 58691D (2005).
24. www.keyence.com.
25. R. P. Angel and W. B. Davison, "Solar concentrator apparatus with large, multiple, co-axis dish reflectors," U.S. patent application number 20090277440 (12 November 2009).
26. R. J. Noll, "Zernike polynomials and atmospheric turbulence," J Opt. Soc. Am. 66, 207-211 (1976).
27. L.Wang, P. Su, R. E. Parks, Y.Wang, R. P. Angel, J. M. Sasian, and J. H. Burge, "A low-cost, flexible, high dynamic range test for free-form illumination optics, " presented at the International Optical Design Conference Jackson Hole, Wyoming, USA, 13-17 June 2010.
28. J. H. Burge, L. B. Kot, H. M. Martin, R. Zehnder, and C. Zhao, "Design and analysis for interferometric measurements of the GMT primary mirror segments," Proc. SPIE 6273, 62730M (2006).
29. J. H. Burge, C. Zhao, and M. Dubin, "Use of the Abbe sine condition to quantify alignment aberrations in optical imaging systems," presented at the International Optical Design Conference Jackson Hole, Wyoming, USA, 13-17 June 2010.
30. www.emargin.com.
31. www.kopin.com.