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Volumn 22, Issue 6, 2012, Pages

Stop grating for perfect replication of micro Fresnel lens by thermal imprinting

Author keywords

[No Author keywords available]

Indexed keywords

FRESNEL LENS; LINE-AND-SPACE; MICRO HOLES; MOLD SURFACES; POLYMER FILLING;

EID: 84861385970     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/22/6/065018     Document Type: Article
Times cited : (6)

References (8)
  • 1
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    • Diffractive optical element for mode shaping of a Nd:YAG laser
    • 10.1364/OL.19.000108 0146-9592
    • Leger J R, Chen D and Wang Z 1994 Diffractive optical element for mode shaping of a Nd:YAG laser Opt. Lett. 19 10810
    • (1994) Opt. Lett. , vol.19 , Issue.2 , pp. 108-110
    • Leger, J.R.1    Chen, D.2    Wang, Z.3
  • 2
    • 0031348356 scopus 로고    scopus 로고
    • Replication techniques for diffractive optical elements
    • PII S0167931797001895
    • Gale M T 1997 Replication techniques for diffractive optical elements Microelectron. Eng. 34 32139 (Pubitemid 127413218)
    • (1997) Microelectronic Engineering , vol.34 , Issue.3-4 , pp. 321-339
    • Gale, M.T.1
  • 3
    • 2942715050 scopus 로고    scopus 로고
    • Fabrication of large diffractive optical elements in thick film on a concave lens surface
    • 10.1364/OE.11.000992 1094-4087
    • Xie Y, Lu Z and Li F 2003 Fabrication of large diffractive optical elements in thick film on a concave lens surface Opt. Express. 11 99295
    • (2003) Opt. Express. , vol.11 , Issue.9 , pp. 992-995
    • Xie, Y.1    Lu, Z.2    Li, F.3
  • 4
    • 44149095772 scopus 로고    scopus 로고
    • Nano-scale patterning using the roll typed UV-nanoimprint lithography tool
    • 10.1016/j.mee.2007.12.059 0167-9317
    • Lee J J, Park S Y, Choi K B and Kim G H 2008 Nano-scale patterning using the roll typed UV-nanoimprint lithography tool Microelectron. Eng. 85 8615
    • (2008) Microelectron. Eng. , vol.85 , Issue.5-6 , pp. 861-865
    • Lee, J.J.1    Park, S.Y.2    Choi, K.B.3    Kim, G.H.4
  • 5
    • 60349131290 scopus 로고    scopus 로고
    • Nanoimprint lithography on silica solcgels: A simple route to sequential patterning
    • 10.1002/adma.200702484 0935-9648
    • Peroz C, Chauveau V, Barthel E and Sondergard E 2009 Nanoimprint lithography on silica solcgels: a simple route to sequential patterning Adv. Mater. 21 5558
    • (2009) Adv. Mater. , vol.21 , Issue.5 , pp. 555-558
    • Peroz, C.1    Chauveau, V.2    Barthel, E.3    Sondergard, E.4
  • 6
    • 15844363855 scopus 로고    scopus 로고
    • Fabrication trends for free-space microoptics
    • DOI 10.1109/JLT.2004.842302
    • Suleski T J and Te K R 2005 Fabrication trends for free space microoptics J. Lightwave Technol. 23 63346 (Pubitemid 40420643)
    • (2005) Journal of Lightwave Technology , vol.23 , Issue.2 , pp. 633-646
    • Suleski, T.J.1    Te Kolste, R.D.2
  • 7
    • 77954893249 scopus 로고    scopus 로고
    • Resist shaping for replication of micro-optical elements with continuous relief in fused silica
    • 10.1364/OL.35.001169 0146-9592
    • Jin P, Gao Y, Liu T, Li X and Tan J 2010 Resist shaping for replication of micro-optical elements with continuous relief in fused silica Opt. Lett. 35 116971
    • (2010) Opt. Lett. , vol.35 , Issue.8 , pp. 1169-1171
    • Jin, P.1    Gao, Y.2    Liu, T.3    Li, X.4    Tan, J.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.