Excimer-laser deinsulation of Parylene-C coated Utah electrode array tips

Sensors and Actuators, B: Chemical

Volumn 166-167, Issue , 2012, Pages 777-786

  Yoo, Je Min ^a,b   Sharma, Asha ^b   Tathireddy, Prashant ^b   Rieth, Loren W ^b   Solzbacher, Florian ^b   Song, Jong In ^a  

^a Gwangju Institute of Science and Technology (GIST)   (South Korea)

^b University of Utah   (United States)

Author keywords

Excimer laser; Laser deinsulation; Parylene; Photoablation; UEA

Indexed keywords

ACTION POTENTIALS; ACTIVE ELECTRODES; AFM; ATOMIC FORCE MICROSCOPE (AFM); ELECTRODE ARRAYS; ELECTRODE TIP; MEASURED SIGNALS; NEURAL SIGNALS; OXYGEN PLASMAS; PARYLENE C; PARYLENE FILM; PARYLENES; PERIPHERAL NERVOUS SYSTEM; PHOTOABLATION; SPUTTERED IRIDIUM OXIDE; UEA;

ALUMINUM FOIL; ATOMIC FORCE MICROSCOPY; ELECTROPHYSIOLOGY; EXCIMER LASERS; IRIDIUM COMPOUNDS; LASER BEAM EFFECTS; OXIDE FILMS; PHOTOELECTRONS; SCANNING ELECTRON MICROSCOPY;

X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 84861183975     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2012.03.073     Document Type: Article

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