Ultrahigh 22 nm resolution EUV coherent diffraction imaging using a tabletop 13 nm high harmonic source

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8324, Issue , 2012, Pages

  Seaberg, Matthew D ^a   Adams, Daniel E ^a   Zhang, Bosheng ^a   Gardner, Dennis F ^a   Murnane, Margaret M ^a   Kapteyn, Henry C ^a  

^a UNIVERSITY OF COLORADO   (United States)

Author keywords

Harmonic generation; Mask inspection; Phase retrieval; X ray imaging

Indexed keywords

COHERENT DIFFRACTION IMAGING; DIFFRACTIVE IMAGING; EXTREME ULTRAVIOLET SOURCES; HIGH HARMONIC GENERATION; HIGH HARMONICS; MASK INSPECTION; NM RESOLUTION; PHASE RETRIEVAL; RECONSTRUCTED IMAGE; SPATIAL RESOLUTION; XRAY IMAGING;

HARMONIC GENERATION; PROCESS CONTROL; UNITS OF MEASUREMENT;

INSPECTION;

EID: 84861063437     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.916524     Document Type: Conference Paper

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