Supercritical fluid deposition of compositionally uniform yttria stabilized zirconia films

Journal of Supercritical Fluids

Volumn 66, Issue , 2012, Pages 328-332

  Le Trequesser, Quentin ^a,b   Mesguich, David ^b   You, Eunyoung ^b   Aymonier, Cyril ^a   Watkins, James J ^b  

^a UNIVERSITÉ DE BORDEAUX   (France)

^b UNIVERSITY OF MASSACHUSETTS   (United States)

Author keywords

Carbon dioxide; Cyclic deposition; Micro SOFC; Supercritical fluid deposition; Yttria stabilized zirconia thin films

Indexed keywords

CODEPOSITION; CRYSTALLINE FILMS; CYCLIC DEPOSITION; ELECTROLYTE THIN FILM; FLUORITE STRUCTURE; MICRO-SOFC; MIXED PRECURSORS; NON-UNIFORM DISTRIBUTION; OXIDE FUEL CELLS; POST DEPOSITION ANNEALING; PRECISE CONTROL; SHORT REACTION INTERVAL; SUPERCRITICAL FLUID DEPOSITION; THICKNESS OF THE FILM; YSZ THIN FILMS; YTTRIA-STABILIZED ZIRCONIA FILMS; YTTRIA-STABILIZED ZIRCONIA THIN FILMS;

CARBON DIOXIDE; HYDROLYSIS; PHOTOELECTRONS; POSITIVE IONS; SOLID OXIDE FUEL CELLS (SOFC); STOICHIOMETRY; THIN FILMS; VAPOR DEPOSITION; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY; YTTRIUM; ZIRCONIUM;

DEPOSITION;

EID: 84860667324     PISSN: 08968446     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.supflu.2011.11.018     Document Type: Article

References (17)

1. D. Beckel, A. Bieberle-Hütter, A. Harvey, A. Infortuna, U. Muecke, M. Prestat, J. Rupp, and L. Gauckler Thin films for micro solid oxide fuel cells J. Power Sources 173 1 2007 325 345
2. A. Bieberle-Hütter, D. Beckel, A. Infortuna, U.P. Muecke, J.L. Rupp, L.J. Gauckler, S. Rey-Mermet, P. Muralt, N.R. Bieri, N. Hotz, M.J. Stutz, D. Poulikakos, P. Heeb, P. Müller, A. Bernard, R. Gmür, and T. Hocker A micro-solid oxide fuel cell system as battery replacement J. Power Sources 177 1 2008 123 130
3. J. Fleig Microelectrodes in solid state ionics Solid State Ionics 161 3-4 2003 279 289
4. T.H. Etsell, and S.N. Flengas Electrical properties of solid oxide electrolytes Chemical Reviews 70 3 1970 339 376
5. B.C.H. Steele, and A. Heinzel Materials for fuel-cell technologies Nature 414 6861 2001 345 352
6. Z. Shao, and S.M. Haile A high-performance cathode for the next generation of solid-oxide fuel cells Nature 431 7005 2004 170 173
7. H. Huang, M. Nakamura, P. Su, R. Fasching, Y. Saito, and F.B. Prinz High-performance ultrathin solid oxide fuel cells for low-temperature operation J. Electrochemical Society 154 1 2007 B20 B24
8. S.J. Litzelman, J.L. Hertz, W. Jung, and H.L. Tuller Opportunities and challenges in materials development for thin film solid oxide fuel cells Fuel Cells 8 5 2008 294 302
9. A. Evans, A. Bieberle-Hütter, H. Galinski, J. Rupp, T. Ryll, B. Scherrer, R. Tölke, and L. Gauckler Micro-solid oxide fuel cells: status, challenges, and chances Monatshefte für Chemie/Chemical Monthly 140 2009 975 983
10. M. Hartmanova, K. Gmucova, and I. Thurzo Dielectric properties of ceria and yttria-stabilized zirconia thin films grown on silicon substrates Solid State Ionics 130 1-2 2000 105 110
11. D. Fork, D. Fenner, G. Connell, J. Phillips, and T. Geballe Epitaxial yttria-stabilized zirconia on hydrogen-terminated Si by pulsed laser deposition Applied Physics Letters 57 11 1990 1137 1139
12. Z. Xu, S. Yarmolenko, and J. Sankar Exploration of combustion cvd method for ysz thin film electrolyte of solid oxide fuel cells Fuel Cell Technologies: State and Perspectives 202 2005 49 57
13. A. O'Neil, and J. Watkins Reactive deposition of conformal metal oxide films from supercritical carbon dioxide Chemistry of Materials 19 23 2007 5460 5466
14. J. Blackburn, D. Long, A. Cabañas, and J. Watkins Deposition of conformal copper and nickel films from supercritical carbon dioxide Science 294 5540 2001 141 145
15. A.H. Romang, and J.J. Watkins Supercritical fluids for the fabrication of semiconductor devices: emerging or missed opportunities? Chemistry Reviews 110 1 2010 459 478
16. 2 as improved interlayers for it-sofc, Chemistry of Materials, doi:10.1021/cm2012846.
17. 2 solutions Chemistry of Materials 17 20 2005 5093 5100