메뉴 건너뛰기




Volumn 3, Issue , 2010, Pages 721-724

A CMOS compatible metal-polymer microchannel heat sink for monolithic chip cooling applications

Author keywords

[No Author keywords available]

Indexed keywords

ADJACENT CHANNELS; CMOS CIRCUITS; CMOS COMPATIBLE; COMPLEMENTARY METAL OXIDE SEMICONDUCTORS; COOLANT FLOW RATES; DESIGN CHANGE; ELECTRONIC CIRCUITRY; LIQUID COOLING; METAL POLYMERS; METAL WALLS; MICRO CHANNEL HEAT SINKS; MONOLITHIC CHIP; STANDARD CMOS;

EID: 84860511596     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IHTC14-23212     Document Type: Conference Paper
Times cited : (4)

References (11)
  • 1
  • 4
    • 27744449064 scopus 로고    scopus 로고
    • High heat flux removal with microchannels - A roadmap of challenges and opportunities
    • ASME, Toronto, Ontario, Canada, June
    • S.G. Kandlikar, "High heat flux removal with microchannels - a roadmap of challenges and opportunities," Third International Conference on Microchannels and Minichannels, ASME, Toronto, Ontario, Canada, June, 2005, pp. 13-15.
    • (2005) Third International Conference on Microchannels and Minichannels , pp. 13-15
    • Kandlikar, S.G.1
  • 6
    • 61849127340 scopus 로고    scopus 로고
    • Fabrication of copper-based microchannel devices and analysis of their flow and heat transfer characteristics
    • F. Mei, W.A. Phillips, B. Lu, W.J. Meng, and S. Guo, "Fabrication of copper-based microchannel devices and analysis of their flow and heat transfer characteristics," Journal of Micromechanics and Microengineering, vol. 19, 2009, p. 035009.
    • (2009) Journal of Micromechanics and Microengineering , vol.19 , pp. 035009
    • Mei, F.1    Phillips, W.A.2    Lu, B.3    Meng, W.J.4    Guo, S.5
  • 7
    • 18744382459 scopus 로고    scopus 로고
    • Flow characteristics in a trapezoidal silicon microchannel
    • P. Hao, F. He, and K. Zhu, "Flow characteristics in a trapezoidal silicon microchannel," Journal of Micromechanics and Microengineering, vol. 15, 2005, pp. 1362-1368.
    • (2005) Journal of Micromechanics and Microengineering , vol.15 , pp. 1362-1368
    • Hao, P.1    He, F.2    Zhu, K.3
  • 8
    • 0742269314 scopus 로고    scopus 로고
    • Planar CMOS compatible process for the fabrication of buried microchannels in silicon, using porous-silicon technology
    • G. Kaltsas, D.N. Pagonis, and A.G. Nassiopoulou, "Planar CMOS compatible process for the fabrication of buried microchannels in silicon, using porous-silicon technology," Journal of Microelectromechanical Systems, vol. 12, 2003, pp. 863-872.
    • (2003) Journal of Microelectromechanical Systems , vol.12 , pp. 863-872
    • Kaltsas, G.1    Pagonis, D.N.2    Nassiopoulou, A.G.3
  • 9
    • 0032100130 scopus 로고    scopus 로고
    • A low-temperature IC-compatible process for fabricating surface-micromachined metallic microchannels
    • I. Papautsky, J. Brazzle, H. Swerdlow, and A.B. Frazier, "A low-temperature IC-compatible process for fabricating surface-micromachined metallic microchannels," Journal of Microelectromechanical Systems, vol. 7, 1998, pp. 267-273.
    • (1998) Journal of Microelectromechanical Systems , vol.7 , pp. 267-273
    • Papautsky, I.1    Brazzle, J.2    Swerdlow, H.3    Frazier, A.B.4
  • 11
    • 33947517616 scopus 로고    scopus 로고
    • Fabrication, modeling and testing of a thin film au/Ti microheater
    • K.L. Zhang, S.K. Chou, and S.S. Ang, "Fabrication, modeling and testing of a thin film Au/Ti microheater," International Journal of Thermal Sciences, vol. 46, 2007, pp. 580-588.
    • (2007) International Journal of Thermal Sciences , vol.46 , pp. 580-588
    • Zhang, K.L.1    Chou, S.K.2    Ang, S.S.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.