Three-dimensional shell fabrication using blow molding of bulk metallic glass

Journal of Microelectromechanical Systems

Volumn 20, Issue 1, 2011, Pages 28-36

  Sarac, Baran ^a   Kumar, Golden ^a   Hodges, Thomas ^a   Ding, Shiyan ^a   Desai, Amish ^b   Schroers, Jan ^a  

^a Yale University   (United States)

^b Tanner Research Inc   (United States)

Author keywords

3 D microshells; Bulk metallic glass (BMG); gyroscopes; microelectromechanical systems (MEMS) devices; packaging; resonators

Indexed keywords

BULK METALLIC GLASS; HIGH STRENGTH; MECHANICAL LOCKING; MICROELECTROMECHANICAL SYSTEMS; MICROSHELLS; MOLDING METHODS; PROCESSING STEPS; SI WAFER;

BLOW MOLDING; COMPOSITE MICROMECHANICS; GLASS; GYROSCOPES; MECHATRONICS; MEMS; METALLIC GLASS; MICROELECTROMECHANICAL DEVICES; MOLDING; PLASTICS MOLDING MACHINES; RESONATORS; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; SURFACE ROUGHNESS;

THREE DIMENSIONAL;

EID: 79551582461     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2010.2090495     Document Type: Article

References (52)

1. M. Madou, Fundamentals of Microfabrication: The Science of Miniaturization. Boca Raton, FL: CRC Press, 2002.
2. K. E. Petersen, "Silicon as a mechanical material," Proc. IEEE, vol. 70, no. 5, pp. 420-457, May 1982.
3. T. Ebefors, E. Kälvesten, and G. Stemme, "New small radius joints based on thermal shrinkage of polyimide in V-grooves for robust self-assembly 3-D microstructures," J. Micromech. Microeng., vol. 8, no. 3, pp. 188- 194, Sep. 1998.
4. H. Lorenz, M. Despont, N. Fahrni, N. LaBianca, P. Renaud, and P. Vettiger, "SU-8: A low-cost negative resist for MEMS," J. Micromech. Microeng., vol. 7, no. 3, pp. 121-124, Sep. 1997.
5. C. M. Waits, A. Modafe, and R. Ghodssi, "Investigation of gray-scale technology for large area 3D silicon MEMS structures," J. Micromech. Microeng., vol. 13, no. 2, pp. 170-177, Mar. 2003.
6. S. M. Kuo and C. H. Lin, "The fabrication of non-spherical microlens arrays utilizing a novel SU-8 stamping method," J. Micromech. Microeng., vol. 18, no. 12, pp. 125 012-1-125 012-7, Dec. 2008.
7. T. Dillon, E. Marchena, C. H. Chen, D. Brady, and D. Prather, "Microlens fabrication using HEBS glass for compact high-resolution IR imaging system," in Proc. SPIE-Nanoengineering: Fabrication, Properties, Optics, and Devices III, 2006, vol. 6327, p. 632 70B.
8. C. T. DeRose, D. Mathine, Y. Enami, R. A. Norwood, J. Luo, A. K. Y. Jen, and N. Peyghambarian, "Electrooptic polymer modulator with single-mode to multimode waveguide transitions," IEEE Photon. Technol. Lett., vol. 20, no. 12, pp. 1051-1053, Jun. 2008.
9. J. E. Y. Lee and A. A. Seshia, "5.4-MHz single-crystal silicon wine glass mode disk resonator with quality factor of 2 million," Sens. Actuators A, Phys., vol. 156, no. 1, pp. 28-35, Nov. 2009.
10. E. J. Eklund and A. M. Shkel, "Glass blowing on a wafer level," J. Microelectromech. Syst., vol. 16, no. 2, pp. 232-239, Apr. 2007.
11. J. Schroers, T. Nguyen, S. O'Keeffe, and A. Desai, "Thermoplastic forming of bulk metallic glass-Applications for MEMS and microstructure fabrication," Mater. Sci. Eng. A, Struct. Mater. Prop. Microstruct. Process., vol. 449, pp. 898-902, Mar. 25, 2007.
12. J. Schroers, Q. Pham, A. Peker, N. Paton, and R. V. Curtis, "Blow molding of bulk metallic glass," Scr. Mater., vol. 57, no. 4, pp. 341-344, Aug. 2007.
13. J. Schroers, "Processing of bulk metallic glass," Adv. Mater., vol. 22, no. 14, pp. 1566-1597, Apr. 2010.
14. W. L. Johnson, "Bulk glass-forming metallic alloys: Science and technology," MRS Bull., vol. 24, pp. 42-56, Oct. 1999.
15. J. Schroers, G. Kumar, T. M. Hodges, S. Chan, and T. R. Kyriakides, "Bulk metallic glasses for biomedical applications," JOM, vol. 61, no. 9, pp. 21-29, Sep. 2009.
16. B. Zberg, P. J. Uggowitzer, and J. F. Loffler, "MgZnCa glasses without clinically observable hydrogen evolution for biodegradable implants," Nat. Mater., vol. 8, no. 11, pp. 887-891, Nov. 2009.
17. Y. Saotome, K. Itoh, T. Zhang, and A. Inoue, "Superplastic nanoforming of Pd-based amorphous alloy," Scr. Mater., vol. 44, no. 8/9, pp. 1541- 1545, May 18, 2001.
18. P. Sharma, N. Kaushik, H. Kimura, Y. Saotome, and A. Inoue, "Nano-fabrication with metallic glass-An exotic material for nano-electromechanical systems," Nanotechnology, vol. 18, no. 3, pp. 035302-1-035302-6, Jan. 24, 2007.
19. G. Kumar, H. X. Tang, and J. Schroers, "Nanomoulding with amorphous metals," Nature, vol. 457, no. 7231, pp. 868-872, Feb. 12, 2009.
20. G. Kumar, A. Desai, and J. Schroers, "Bulk metallic glass: The smaller the better," Adv. Mater., 2010, to be published, DOI: 10.1002/adma.201002148.
21. J. Schroers, Q. Pham, and A. Desai, "Thermoplastic forming of bulk metallic glass-A technology forMEMS and microstructure fabrication," J. Microelectromech. Syst., vol. 16, no. 2, pp. 240-247, Apr. 2007. (Pubitemid 46564200)
22. J. P. Chu, H. Wijaya, C. W. Wu, T. R. Tsai, C. S. Wei, T. G. Nieh, and J. Wadsworth, "Nanoimprint of gratings on a bulk metallic glass," Appl. Phys. Lett., vol. 90, no. 3, pp. 034101-1-034101-3, Jan. 15, 2007.
23. G. Kumar and J. Schroers, "Write and erase mechanisms for bulk metallic glass," Appl. Phys. Lett., vol. 92, no. 3, pp. 031901-1-031901-3, Jan. 21, 2008.
24. C. T. Pan, T. T. Wu, Y. C. Chang, and J. C. Huang, "Experiment and simulation of hot embossing of a bulk metallic glass with low pressure and temperature," J. Micromech. Microeng., vol. 18, no. 2, pp. 025010-1- 025010-12, Feb. 2008.
25. A. Inoue and N. Nishiyama, "New bulk metallic glasses for applications as magnetic-sensing, chemical, and structural materials," MRS Bull., vol. 32, pp. 651-658, Aug. 2007.
26. D. L. Henann, V. Srivastava, H. K. Taylor, M. R. Hale, D. E. Hardt, and L. Anand, "Metallic glasses: Viable tool materials for the production of surface microstructures in amorphous polymers by micro-hotembossing," J. Micromech. Microeng., vol. 19, no. 11, pp. 115 030-1- 115 030-10, Nov. 2009.
27. R. D. Conner, W. L. Johnson, N. E. Paton, and W. D. Nix, "Shear bands and cracking of metallic glass plates in bending," J. Appl. Phys., vol. 94, no. 2, pp. 904-911, Jul. 15, 2003.
28. J. Schroers, B. Lohwongwatana, W. L. Johnson, and A. Peker, "Gold based bulk metallic glass," Appl. Phys. Lett., vol. 87, no. 6, pp. 061912-1- 061912-3, Aug. 8, 2005.
29. B. Zhang, D. Q. Zhao, M. X. Pan, W. H. Wang, and A. L. Greer, "Amorphous metallic plastic," Phys. Rev. Lett., vol. 94, no. 20, pp. 205 502-1- 205 502-4, May 27, 2005.
30. B. A. Legg, J. Schroers, and R. Busch, "Thermodynamics, kinetics, and crystallization of Pt57.3Cu14.6Ni5.3P22.8 bulk metallic glass," Acta Mater., vol. 55, no. 3, pp. 1109-1116, Feb. 2007.
31. G. Duan, A. Wiest, M. L. Lind, J. Li, W. K. Rhim, and W. L. Johnson, "Bulk metallic glass with benchmark thermoplastic processability," Adv. Mater., vol. 19, no. 23, pp. 4272-4275, Dec. 3, 2007. (Pubitemid 350254810)
32. J. Schroers and N. Paton, "Amorphous metal alloys form like plastics," Adv. Mater. Process., vol. 164, no. 1, pp. 61-63, Jan. 2006.
33. H. W. Jeong, S. Hata, and A. Shimokohbe, "Microforming of threedimensional microstructures from thin-film metallic glass," J. Microelectromech. Syst., vol. 12, no. 1, pp. 42-52, Feb. 2003.
34. N. Nishiyama, K. Amiya, and A. Inoue, "Bulk metallic glasses for industrial products," Mater. Trans., vol. 45, no. 4, pp. 1245-1250, Apr. 2004.
35. J. Schroers, "The superplastic forming of bulk metallic glasses," JOM, vol. 57, no. 5, pp. 35-39, May 2005.
36. R. Busch, J. Schroers, and W. H. Wang, "Thermodynamics and kinetics of bulk metallic glass," MRS Bull., vol. 32, pp. 620-623, Aug. 2007.
37. G. Kumar, D. Rector, R. D. Conner, and J. Schroers, "Embrittlement of Zr-based bulk metallic glasses," Acta Mater., vol. 57, no. 12, pp. 3572- 3583, Jul. 2009.
38. J. Lu, G. Ravichandran, and W. L. Johnson, "Deformation behavior of the Zr41.2Ti13.8Cu12.5Ni10Be22.5 bulk metallic glass over a wide range of strain-rates and temperatures," Acta Mater., vol. 51, no. 12, pp. 3429- 3443, Jul. 16, 2003.
39. J. M. Dealy, "Official nomenclature for material functions describing the response of a viscoelastic fluid to various shearing and extensional deformations," J. Rheol., vol. 39, no. 1, pp. 253-265, Jan./Feb. 1995.
40. J. Schroers, "On the formability of bulk metallic glass in its supercooled liquid state," Acta Mater., vol. 56, no. 3, pp. 471-478, Feb. 2008.
41. T. Waniuk, J. Schroers, and W. L. Johnson, "Timescales of crystallization and viscous flow of the bulk glass-forming Zr-Ti-Ni-Cu-Be alloys," Phys. Rev. B, Condens. Matter, vol. 67, no. 18, pp. 184 203-1-184 203-9, May 1, 2003.
42. M. D. Demetriou, C. Veazey, J. Schroers, J. C. Hanan, and W. L. Johnson, "Thermo-plastic expansion of amorphous metallic foam," J. Alloys Compounds, vol. 434, pp. 92-96, May 31, 2007.
43. J. Schroers, Y. Wu, and W. L. Johnson, "Heterogeneous influences on the crystallization of Pd43Ni10Cu27P20," Philos. Mag. A, Phys. Condens. Matter Struct. Defects Mech. Prop., vol. 82, no. 6, pp. 1207-1217, Apr. 2002.
44. K. Ohsaka, S. K. Chung, W. K. Rhim, A. Peker, D. Scruggs, and W. L. Johnson, "Specific volumes of theZr41.2Ti13.8Cu12.5Ni10.0Be22.5 alloy in the liquid, glass, and crystalline states," Appl. Phys. Lett., vol. 70, no. 6, pp. 726-728, Feb. 10, 1997.
45. R. B. Roberts, "Thermal-expansion reference data-Silicon 300-850-K," J. Phys. D, Appl. Phys., vol. 14, no. 10, pp. L163-L166, Oct. 1981.
46. N. Morito and T. Egami, "Internal-friction and reversible structural relaxation in the metallic-glass Fe32Ni36Cr14P12B6," Acta Metall., vol. 32, no. 4, pp. 603-613, Apr. 1984.
47. Y. V. Fursova and V. A. Khonik, "Viscoelastic infralow-frequency internal friction as a result of irreversible structural relaxation of a metallic glass," Philos. Mag. A, Phys. Condens. Matter Struct. Defects Mech. Prop., vol. 80, no. 8, pp. 1855-1865, Aug. 2000.
48. Y. V. Fursova and V. A. Khonik, "Amplitude dependent viscoelastic internal friction of metallic glass," Scr. Mater., vol. 46, no. 7, pp. 519-523, Apr. 11, 2002.
49. S. Bossuyt, S. Gimenez, and J. Schroers, "Resonant vibration analysis for temperature dependence of elastic properties of bulk metallic glass," J. Mater. Res., vol. 22, no. 2, pp. 533-537, Feb. 2007.
50. Y. Hiki, R. Tamura, and S. Takeuchi, "Internal friction of metallic glass measured as function of strain amplitude at various temperatures," Mater. Sci. Eng. A, Struct. Mater. Prop. Microstruct. Process., vol. 521/522, pp. 228-231, Sep. 25, 2009.
51. G. Kumar, P. A. Staffier, J. Blawzdziewicz, U. D. Schwarz, and J. Schroers, "Atomically smooth surfaces through thermoplastic forming of metallic glass," Appl. Phys. Lett., vol. 97, no. 10, pp. 101 907-1- 101 907-3, Sep. 2010.
52. C. A. Schuh, T. C. Hufnagel, and U. Ramamurty, "Overview no. 144-Mechanical behavior of amorphous alloys," Acta Mater., vol. 55, no. 12, pp. 4067-4109, Jul. 2007.