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Thin Solid Films

Volumn 520, Issue 14, 2012, Pages 4722-4725

Optical properties of amorphous-like indium zinc oxide and indium gallium zinc oxide thin films

(3) Galca, A C a Socol, G b Craciun, V b,c

a NATIONAL INSTITUTE OF MATERIALS PHYSICS (Romania)

b NATIONAL INSTITUTE FOR LASER (Romania)

c UNIVERSITY OF FLORIDA (United States)

Author keywords

Amorphous oxide semiconductors; Optical properties; Spectroscopic ellipsometry; Thin films; Transparent conductive oxides; X ray reflectivity

Indexed keywords

AMORPHOUS OXIDE SEMICONDUCTOR (AOS); AMORPHOUS-LIKE; FREE CARRIER ABSORPTION; INDIUM GALLIUM ZINC OXIDES; INDIUM ZINC OXIDES; TRANSPARENT CONDUCTIVE OXIDES; VISIBLE SPECTRAL RANGE; X RAY REFLECTIVITY; ZNO;

OPTICAL PROPERTIES; PULSED LASER DEPOSITION; REFRACTIVE INDEX; SPECTROSCOPIC ELLIPSOMETRY; STOICHIOMETRY; ZINC OXIDE;

THIN FILMS;

EID: 84860290106 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2011.10.194 Document Type: Conference Paper

Times cited : (40)

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