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Volumn 95, Issue 8, 2011, Pages 2357-2362

Low temperature Si doped ZnO thin films for transparent conducting oxides

Author keywords

Optical properties; Pulsed laser deposition; Simulation; Transparent conducting oxide; Zinc oxide

Indexed keywords

CONDUCTIVE FILMS; ELECTRONIC PROPERTIES; II-VI SEMICONDUCTORS; OPTICAL PROPERTIES; OXYGEN; PULSED LASER DEPOSITION; PULSED LASERS; SILICON COMPOUNDS; SUBSTRATES; TEMPERATURE; TRANSPARENT CONDUCTING OXIDES; ZINC OXIDE;

EID: 79958162593     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.solmat.2011.04.006     Document Type: Article
Times cited : (93)

References (26)
  • 3
    • 0034251174 scopus 로고    scopus 로고
    • New n-type transparent conducting oxides
    • Tadatsugu Minami New n-type transparent conducting oxides MRS Bulletin 25 2000 38 44
    • (2000) MRS Bulletin , vol.25 , pp. 38-44
    • Minami, T.1
  • 5
    • 0031209786 scopus 로고    scopus 로고
    • Ultraviolet spontaneous and stimulated emissions from ZnO microcrystallite thin films at room temperature
    • PII S0038109897002160
    • Z.K. Tang, P. Yu, G.K.L. Wang, M. Kawasaki, A. Ohtomoto, H. Koinuma, and Y. Segawa Ultraviolet spontaneous and stimulated emissions from ZnO microcrystallite thin films at room temperature Solid State Communications 103 1997 459 463 (Pubitemid 127398674)
    • (1997) Solid State Communications , vol.103 , Issue.8 , pp. 459-463
    • Zu, P.1    Tang, Z.K.2    Wong, G.K.L.3    Kawasaki, M.4    Ohtomo, A.5    Koinuma, H.6    Segawa, Y.7
  • 6
    • 49049130578 scopus 로고
    • Growth of c-axis oriented ZnO term thin films with high deposition rate on silicon by previous CVD method
    • M. Shimizu, T. Shiosaki, and A. Kawabata Growth of c-axis oriented ZnO term thin films with high deposition rate on silicon by previous CVD method Journal of Crystal Growth 57 1982 94 100
    • (1982) Journal of Crystal Growth , vol.57 , pp. 94-100
    • Shimizu, M.1    Shiosaki, T.2    Kawabata, A.3
  • 7
    • 36549094294 scopus 로고
    • Optical properties of sputter-deposited ZnO:Al thin films
    • Z.-C. Jin, I. Hamberg, and C.-G. Granqvist Optical properties of sputter-deposited ZnO:Al thin films Journal of Applied Physics 64 10 1988 5117 5131
    • (1988) Journal of Applied Physics , vol.64 , Issue.10 , pp. 5117-5131
    • Jin, Z.-C.1    Hamberg, I.2    Granqvist, C.-G.3
  • 8
    • 0037416605 scopus 로고    scopus 로고
    • Influence of the deposition pressure on the properties of transparent and conductive ZnO:Ga thin-film produced by r.f. sputtering at room temperature
    • V. Assunção, E. Fortunato, A. Marquesa, H. Águasa, I. Ferreira, M.E.V. Costa, and R. Martins Influence of the deposition pressure on the properties of transparent and conductive ZnO:Ga thin-film produced by r.f. sputtering at room temperature Thin Solid Films 427 2003 401 405
    • (2003) Thin Solid Films , vol.427 , pp. 401-405
    • Assunção, V.1    Fortunato, E.2    Marquesa, A.3    Águasa, H.4    Ferreira, I.5    Costa, M.E.V.6    Martins, R.7
  • 9
    • 0035824090 scopus 로고    scopus 로고
    • Resistivity of polycrystalline zinc oxide films: Current status and physical limit
    • DOI 10.1088/0022-3727/34/21/301, PII S0022372701270144
    • K. Ellmer Resistivity of polycrystalline zinc oxide films: current status and physical limit Journal of Physics D: Applied Physics 34 2001 3097 3108 (Pubitemid 33120726)
    • (2001) Journal of Physics D: Applied Physics , vol.34 , Issue.21 , pp. 3097-3108
    • Ellmer, K.1
  • 11
    • 43949110578 scopus 로고    scopus 로고
    • Electric properties and surface characterization of transparent Al-doped ZnO thin films prepared by pulsed laser deposition
    • DOI 10.1016/j.tsf.2007.07.095, PII S0040609007011625
    • J.P. Kim, S.-A. Lee, J.S. Bae, S.K. Park, U.C. Choi, and C.R. Cho Electrical properties and surface characterization of transparent Al-doped ZnO thin films prepared by pulsed laser deposition Thin Solid Films 516 2008 5223 5226 (Pubitemid 351707422)
    • (2008) Thin Solid Films , vol.516 , Issue.16 , pp. 5223-5226
    • Kim, J.-P.1    Lee, S.-A.2    Bae, J.S.3    Park, S.-K.4    Choi, U.-C.5    Cho, C.-R.6
  • 13
    • 0022778647 scopus 로고
    • Highly conductive and transparent silicon doped zinc oxide thin films prepared by RF magnetron sputtering
    • T. Minami, H. Sato, H. Nanto, and S. Takata Highly conductive and transparent silicon doped zinc oxide thin films prepared by RF magnetron sputtering Japan Journal of Applied Physics 25 1986 L776 L779
    • (1986) Japan Journal of Applied Physics , vol.25
    • Minami, T.1    Sato, H.2    Nanto, H.3    Takata, S.4
  • 14
    • 70349154683 scopus 로고    scopus 로고
    • Effect of Si doping on electrical and optical properties of ZnO thin films grown by sequential pulsed laser deposition
    • A.K. Das, P. Misra, and L.M. Kukreja Effect of Si doping on electrical and optical properties of ZnO thin films grown by sequential pulsed laser deposition Journal of Physics D: Applied Physics 42 2009 165405 165412
    • (2009) Journal of Physics D: Applied Physics , vol.42 , pp. 165405-165412
    • Das, A.K.1    Misra, P.2    Kukreja, L.M.3
  • 15
    • 79952311264 scopus 로고    scopus 로고
    • Room temperature transparent conducting oxides based on zinc oxide thin films
    • (in press), doi:10.1016/j.apsusc.2010.12.010
    • J. Clatot, G. Campet, A. Zeinert, C. Labrugère, A. Rougier, Room temperature transparent conducting oxides based on zinc oxide thin films, Applied Surface Science (in press), doi:10.1016/j.apsusc.2010.12.010.
    • Applied Surface Science
    • Clatot, J.1    Campet, G.2    Zeinert, A.3    Labrugère, C.4    Rougier, A.5
  • 16
    • 34247618073 scopus 로고
    • (Ed.)F. Abeles Amsterdam, North-Holland
    • J. Tauc, Optical Properties of Solids, vol. 22(Ed.)F. Abeles Amsterdam, North-Holland (1970) p. 903.
    • (1970) Optical Properties of Solids , vol.22 , pp. 903
    • Tauc, J.1
  • 17
    • 33646202250 scopus 로고
    • Anomalous optical absorption limit in InSb
    • E. Burstein Anomalous optical absorption limit in InSb Physical Review 93 1954 632 633
    • (1954) Physical Review , vol.93 , pp. 632-633
    • Burstein, E.1
  • 19
    • 79958145183 scopus 로고    scopus 로고
    • 〈http://www.wtheiss.com/〉
  • 20
    • 0000068244 scopus 로고
    • Modeling the optical dielectric function of semiconductors: Extension of the critical-point parabolic-band approximation
    • C.C. Kim, J.W. Garland, H. Abad, and P.M. Raccah Modeling the optical dielectric function of semiconductors: extension of the critical-point parabolic-band approximation Physical Review B 45 1992 11749 11767
    • (1992) Physical Review B , vol.45 , pp. 11749-11767
    • Kim, C.C.1    Garland, J.W.2    Abad, H.3    Raccah, P.M.4
  • 22
    • 77955620613 scopus 로고    scopus 로고
    • Optical properties of zinc oxide thin films doped with aluminium and lithium
    • A.C. Gâlc, M. Secu, A. Vlad, and J.D. Pedarnig Optical properties of zinc oxide thin films doped with aluminium and lithium Thin Solid Films 518 2010 4603 4606
    • (2010) Thin Solid Films , vol.518 , pp. 4603-4606
    • Gâlc, A.C.1    Secu, M.2    Vlad, A.3    Pedarnig, J.D.4
  • 23
    • 77955760072 scopus 로고    scopus 로고
    • Formation mechanisms of metallic Zn nanodots by using ZnO thin films deposited on n-Si substrates
    • J.M. Yuk, J.Y. Lee, Y. Kim, Y.S. No, T.W. Kim, and W.K. Choi Formation mechanisms of metallic Zn nanodots by using ZnO thin films deposited on n-Si substrates Applied Physics Letters 97 2010 0619011 0619013
    • (2010) Applied Physics Letters , vol.97 , pp. 0619011-0619013
    • Yuk, J.M.1    Lee, J.Y.2    Kim, Y.3    No, Y.S.4    Kim, T.W.5    Choi, W.K.6
  • 24
    • 77956354289 scopus 로고    scopus 로고
    • Abrupt resistivity decrease and other unexpected phenomena in a doped amorphous ternary metal oxide
    • J. Sun, and H. Gong Abrupt resistivity decrease and other unexpected phenomena in a doped amorphous ternary metal oxide Applied Physics Letters 97 2010 0921061 0921063
    • (2010) Applied Physics Letters , vol.97 , pp. 0921061-0921063
    • Sun, J.1    Gong, H.2
  • 25
    • 78751555917 scopus 로고    scopus 로고
    • Nanocomposite indiumtin oxide films formation induced by a large oxygen deficiency
    • M. Nistor, J. Perrière, C. Hebert, and W. Seiler Nanocomposite indiumtin oxide films formation induced by a large oxygen deficiency Journal of Physics: Condensed Matter 22 2010 0450061 0450067
    • (2010) Journal of Physics: Condensed Matter , vol.22 , pp. 0450061-0450067
    • Nistor, M.1    Perrière, J.2    Hebert, C.3    Seiler, W.4
  • 26
    • 69249203712 scopus 로고    scopus 로고
    • Fluorination of alumino-silicate minerals: The example of lepidolite
    • Larisa P. Demyanova, and A. Tressaud Fluorination of alumino-silicate minerals: the example of lepidolite Journal of Fluorine Chemistry 130 2009 799 805
    • (2009) Journal of Fluorine Chemistry , vol.130 , pp. 799-805
    • Demyanova, L.P.1    Tressaud, A.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.