Rapid optical surface figuring using reactive atom plasma

Precision Engineering

Volumn 36, Issue 3, 2012, Pages 467-476

  Castelli, M ^a   Jourdain, R ^a   Morantz, P ^a   Shore, P ^a  

^a CRANFIELD UNIVERSITY   (United Kingdom)

Author keywords

Dwell time methods; Optical fabrication; Rapid figuring; Reactive atom plasma; Ultra precision surface

Indexed keywords

DWELL-TIME METHODS; OPTICAL FABRICATION; RAPID FIGURING; REACTIVE ATOM PLASMA; ULTRA PRECISION;

ALGORITHMS; ATOMS; CONVOLUTION; ETCHING; INDUCTIVELY COUPLED PLASMA; PRECISION ENGINEERING; SURFACE ROUGHNESS;

SURFACES;

EID: 84860227078     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.precisioneng.2012.02.005     Document Type: Article

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