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Volumn 2010-January, Issue , 2010, Pages 569-572
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Initial strategies for 3D RAP processing of optical surfaces based on a temperature adaptation approach
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Author keywords
Atmospheric pressure; Figuring; Low thermal expasion glass; Plasma torch; RAP; Removal rate; Roughness; Ultra precision surfaces
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Indexed keywords
ATMOSPHERIC PRESSURE;
CONVOLUTION;
ETCHING;
FUSED SILICA;
INTERFEROMETRY;
PLASMA TORCHES;
PRECISION ENGINEERING;
SUBSTRATES;
TOPOGRAPHY;
FIGURING;
PHASE SHIFT INTERFEROMETRY;
REMOVAL RATE;
SYNTHETIC FUSED SILICA;
THERMAL EFFECTS COMPENSATION;
TOPOGRAPHY MEASUREMENT;
ULTRA PRECISION;
WHITE-LIGHT INTERFEROMETRY;
SURFACE ROUGHNESS;
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EID: 84855786655
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1007/978-1-84996-432-6_124 Document Type: Conference Paper |
Times cited : (14)
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References (5)
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