Rapid damage-free shaping of silicon carbide using Reactive Atom Plasma (RAP) processing

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6273 I, Issue , 2006, Pages

  Verma, Yogesh ^a   Chang, Andrew K ^a   Berrett, John W ^a   Futtere, Kenneth ^a   Gardopee, George J ^a   Kelley, Jude ^a   Kyler, Thomas ^a   Lee, Jeonghwa ^a   Lyford, Nick ^a   Proscia, David ^a   Sommer, Phillip R ^a  

^a RAPT Industries Inc   (United States)

Author keywords

Optics; RAP; Reactive atom plasma; Silicon carbide; Sub surface damage

Indexed keywords

GRIT SIZES; REACTIVE ATOM PLASMA (RAP); SUBSURFACE DAMAGE; SURFACE FORM;

ATMOSPHERIC PRESSURE; CRACK INITIATION; GRINDING (MACHINING); OPTICS; PLASMAS; SILICON CARBIDE;

OPTICAL MATERIALS;

EID: 33749630459     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.671969     Document Type: Conference Paper

References (8)

1. Preston, F. W., "The structure of abraded glass surfaces", Trans. Opt. Soc. v. 23, 141-164, 1921
2. Li, K., and Liao, T. W., "Surface/subsurface damage and fracture strength of ground ceramics", J. Mat. Proc. Tech. v. 57, 207-220, 1996
3. Golini, D., and Jacobs, S. D., "Physics of loose abrasive microgrinding", Appl. Optics v. 30, 2761-2777, 1991
4. Lambropoulos, J. C., Xu, S., Fang, T., and Golini, D., "Twyman effect mechanics in grinding and microgrinding", Appl Optics v. 35, pp 5704-5713, 1996
5. Randi, J. A., Lambropolous, J. C., and Jacobs, S. D., "Subsurface damage in some single crystalline optical materials" Appl. Optics v. 44, 2241-2249, 2005
6. Dalladay, A. J. "Some measurement of the stress produced at the surfaces of glass by grinding with loose abrasives," Trans. Opt. Soc. London v. 23, 170-173, 1922
7. Johnson, J. S., Grobsky, K., and Bray, D. J., "Rapid fabrication of lightweight silicon carbide mirrors", in Optomechanical Design and Engineering 2002 (A. E. Hathaway, ed.), Proceedings of SPIE v. 4771, p. 243-253, 2002
8. Miller, P. E., Suratwala, T. I., Wong, L. L., Feit, M. D., Menapace, J. A., Davis, P. J., and Steele, R. A., "The distribution of subsurface damage in fused silica" in Boulder Damage Symposium 2005