Miniature temperature compensated Fabry-Perot pressure sensors created with self-aligned polymer photolithography process

IEEE Sensors Journal

Volumn 12, Issue 5, 2012, Pages 1566-1573

  Bae, Hyungdae ^a   Dunlap, Laura ^b   Wong, James ^a,c   Yu, Miao ^a  

^a UNIVERSITY OF MARYLAND   (United States)

^b UNIVERSITY OF MARYLAND   (United States)

^c ACCENTURE   (United States)

Author keywords

Fabry Perot; lithography; pressure measurement; temperature dependence

Indexed keywords

CO-AXIAL; EXPERIMENTAL STUDIES; FABRY-PEROT; FABRY-PEROT PRESSURE SENSOR; MASK LESS; PHOTOLITHOGRAPHY PROCESS; POLYMER-METAL COMPOSITE; PRESSURE RANGES; PRESSURE READING; SELF-ALIGNED; SENSOR FABRICATION; SINGLE-MODE OPTICAL FIBER; TEMPERATURE DEPENDENCE; THIN DIAPHRAGMS; UV-CURING;

CURING; DYNAMIC RESPONSE; FIBER BRAGG GRATINGS; LITHOGRAPHY; OPTICAL FIBER FABRICATION; PARTIAL PRESSURE SENSORS; PHOTOLITHOGRAPHY; PRESSURE MEASUREMENT; TEMPERATURE MEASUREMENT;

POLYMERS;

EID: 84860197331     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2011.2174439     Document Type: Article

References (26)

1. Y. J. Rao, "Recent progress in fiber-optic extrinsic Fabry-Perot interferometric sensors," Opt. Fiber Technol., vol. 12, pp. 227-237, 2006.
2. S. Nesson, M. Yu, X. M. Zhang, and A. H. Hsieh, "Miniature fiber optic pressure sensor with composite polymer-metal diaphragm for intradiscal pressure measurements," J. Biomed. Opt., vol. 13, p. 044040, 2008.
3. K. Totsu, Y. Haga, and M. Esashi, "Ultra-miniature fiber-optic pressure sensor using white light interferometry," J. Micromech. Microeng., vol. 15, pp. 71-75, 2005. (Pubitemid 40121479)
4. E. S. Olson, "Observing middle and inner ear mechanics with novel intracochlear pressure sensors," J. Acoust. Soc. Am., vol. 103, pp. 3445-3463, 1998. (Pubitemid 28274968)
5. M. J. Gander, W. N. MacPherson, J. S. Barton, R. L. Reuben, J. D. C. Jones, R. Stevens, K. S. Chana, S. J. Anderson, and T. V. Jones, "Embedded micromachined fiber-optic Fabry-Perot pressure sensors in aerodynamics applications," IEEE Sensors J., vol. 3, pp. 102-107, 2003.
6. Y. Liu, L. Alexander, G. Wang, P. Ashish, and M. Yu, "Wireless fiber optic sensor system for strain and pressure measurements on a rotor blade," Proc. Fiber Optic Sensors Appl. V, vol. 6770, pp. 67700Y. 1-67700Y.12, 2007.
7. W. N. MacPherson, J. M. Kilpatrick, J. S. Barton, and J. D. C. Jones, "Miniature fiber optic pressure sensor for turbomachinery applications," Rev. Sci. Instrum., vol. 70, pp. 1868-1874, 1999. (Pubitemid 129578558)
8. S. Watson, M. J. Gander, W. N. MacPherson, J. S. Barton, J. D. C. Jones, T. Klotzbuecher, T. Braune, J. Ott, and F. Schmitz, "Laser-machined fibers as Fabry-Pérot pressure sensors," Appl. Opt., vol. 45, pp. 5590-5596, 2006. (Pubitemid 44562647)
9. X. Wang, J. Xu, Y. Zhu, K. L. Cooper, and A. Wang, "All-fusedsilica miniature optical fiber tip pressure sensor," Opt. Lett., vol. 31, pp. 885-887, 2006. (Pubitemid 43837494)
10. W. Wang, N. Wu, Y. Tian, C. Niezrecki, and X. Wang, "Miniature all-silica optical fiber pressure sensor with an ultrathin uniform diaphragm," Opt. Exp., vol. 18, pp. 9006-9014, 2010.
11. G. C. Hill, R. Melamudb, F. E. Declercqb, A. A. Davenport, I. H. Chanc, P. G. Hartwelld, and B. L. Pruitt, "SU-8 MEMS Fabry-Perot pressure sensor," Sens. Actuators, A, vol. 138, pp. 52-62, 2007. (Pubitemid 47002254)
12. Q. Wang, L. Zhang, C. Sun, and Q. Yu, "Multiplexed fiber-optic pressure and temperature sensor system for down-hole measurement," IEEE Sensors J., vol. 8, pp. 1879-1883, 2008.
13. J. Xu, X. Wang, K. L. Cooper, G. R. Gary, and A. Wang, "Miniature temperature-insensitive Fabry-Perot fiber-optic pressure sensor," IEEE Photonics Technol. Lett., vol. 18, pp. 1134-1136, 2006.
14. S. H. Aref, H. Latifi, M. I. Zibaii, and M. Afshari, "Fiber optic Fabry-Perot pressure sensor with low sensitivity to temperature changes for downhole application," Opt. Commun., vol. 269, pp. 322-330, 2007. (Pubitemid 44779665)
15. W.Wang, N.Wu,Y. Tian, X.Wang, C. Niezrecki, and J. Chen, "Optical pressure/acoustic sensor with precise Fabry-Perot cavity length control using angle polished fiber," Opt. Exp., vol. 17, pp. 16613-16618, 2009.
16. V. L. Streeter and E. B. Wylie, Fluid Mechanics, 8th ed. New York: McGraw-Hill, 1985, pp. 351-353.
17. D. C. Abeysinghe, S. Dasgupta, H. E. Jackson, and J. T. Boyd, "Novel MEMS pressure and temperature sensors fabricated on optical fibers," J. Micromech. Microeng., vol. 12, pp. 229-235, 2002. (Pubitemid 34575152)
18. J. Alda, "Laser and Gaussian Beam Propagation and Transformation ," in Encyclopedia of Optical Engineering. New York: Marcel Dekker, 2003, pp. 999-1013.
19. N. Hodgson and H. Weber, Optical Resonators: Fundamentals, Advanced Concepts and Applications. London, U.K.: Springer, 1977.
20. H. Bae, X. M. Zhang, H. Liu, and M.Yu, "Miniature surface-mountable Fabry-Perot pressure sensor constructed with a 45 angled fiber," Opt. Lett., vol. 35, pp. 1701-1703, 2010.
21. R. Whiting, M. A. Angadi, and S. Tripathi, "Evaluation of elastic moduli in thin-film/substrate systems by the two-layer vibrating reed method," Mater. Sci. Eng., vol. B30, pp. 35-38, 1995.
22. B. Qi, G. R. Pickrell, J. Xu, P. Zhang, Y. Duan, W. Peng, Z. Huang, W. Huo, H. Xiao, R. G. May, and A. Wang, "Novel data processing techniques for dispersive white light interferometer," Opt. Eng., vol. 42, pp. 3165-3171, 2003.
23. T. Liu et al., "Simultaneous strain and temperature measurements in composites using a multiplexed fibre Bragg grating sensor and an extrinsic Fabry-Perot sensor," in Proc. Smart Structures Mater.: Smart Sensing, Process., Instrum., 1997, vol. 3042, pp. 203-212.
24. G. Leen, S. Lochmann, and I. Mueller, "Conception and preliminary evaluation of an optical fibre sensor for simultaneous measurement of pressure and temperature," in Proc. J. Phys.: Conf. Ser., 2009, vol. 178, p. 012016.
25. W. Parkes et al., "Design and fabrication of dielectric diaphragm pressure sensors for applications to shock wave measurement in air," J. Micromech. Microeng., vol. 17, pp. 1334-1342, 2007. (Pubitemid 47192954)
26. N. Wu et al., "Low-cost rapid miniature optical pressure sensors for blast wave measurements," Opt. Exp., vol. 19, pp. 10797-10804, 2011.