Design and fabrication of dielectric diaphragm pressure sensors for applications to shock wave measurement in air

Journal of Micromechanics and Microengineering

Volumn 17, Issue 7, 2007, Pages 1334-1342

  Parkes, W ^a   Djakov, V ^b   Barton, J S ^c   Watson, S ^c   MacPherson, W N ^c   Stevenson, J T M ^a   Dunare, C C ^a  

^a Scottish Microelectronics Centre   (United Kingdom)

^b RUTHERFORD APPLETON LABORATORY   (United Kingdom)

^c HERIOT WATT UNIVERSITY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

DIAPHRAGMS; DIELECTRIC DEVICES; MICROMACHINING; OPTICAL FIBERS; SHOCK WAVES;

DIELECTRIC DIAPHRAGM PRESSURE SENSORS; ELECTRICAL SENSORS; OPTICAL FIBRE PRESSURE SENSORS; SHOCK WAVE MEASUREMENT;

PRESSURE SENSORS;

EID: 34547569195     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/7/016     Document Type: Article

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