Love wave characterization of the shear modulus variations of mesoporous sensitive films during vapor sorption

IEEE Sensors Journal

Volumn 12, Issue 5, 2012, Pages 1442-1449

  Blanc, Laurianne ^a   Tetelin, Angelique ^a   Boissière, Cédric ^b   Tortissier, Grégory ^a   Dejous, Corinne ^a   Rebière, Dominique ^a  

^a UNIVERSITÉ DE BORDEAUX   (France)

^b UNIVERSITÉ PIERRE ET MARIE CURIE   (France)

Author keywords

Gas sensors; sensor applications; shear modulus measurement; surface acoustic waves; thin film testing

Indexed keywords

ANOMALOUS RESPONSE; ELASTIC SHEAR MODULUS; ELLIPSOMETRIC POROSIMETRY; HIGH HUMIDITY; HUMIDITY EXPOSURES; INITIAL VALUES; LOVE WAVE; MECHANICAL BEHAVIOR; MESOPOROUS; MESOPOROUS TITANIA; MODULUS MEASUREMENTS; MULTI-LAYERED; SENSITIVE FILMS; SENSOR APPLICATIONS; SHEAR MODULUS VARIATION; SURFACE ACOUSTIC WAVES; THICKNESS OF THE FILM; VAPOR SORPTION; VELOCITY SHIFT; WATER SORPTION;

ACOUSTIC SURFACE WAVE DEVICES; ADSORPTION; CHEMICAL SENSORS; DESORPTION; ELASTIC MODULI; ELASTICITY; MESOPOROUS MATERIALS; THIN FILMS; TITANIUM DIOXIDE; WATER VAPOR;

SHEAR STRAIN;

EID: 84859884888     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2011.2173189     Document Type: Article

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