Mesoporous thin films as versatile sensitive matrices on love wave sensors for fast sub-PPM vapor detection

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2009, Pages 453-456

  Tortissier, Gregory ^a   Blanc, Laurianne ^a   Tetelin, Angelique ^a   Pistre, Jacques ^a   Lachaud, Jean Luc ^a   Boissiere, Cedric ^b   Sanchez, Clement ^b   Dejous, Corinne ^a   Rebiere, Dominique ^a  

^a UNIVERSITÉ DE BORDEAUX   (France)

^b SORBONNE UNIVERSITÉ   (France)

Author keywords

Acoustic wave sensors; Love wave sensors; Mesoporous materials; Sol Gel technique

Indexed keywords

ACOUSTIC PATH; ACOUSTIC WAVE SENSORS; FREQUENCY SHIFT; GAS SENSORS; HIGH SENSITIVITY; LOVE WAVE; LOVE WAVE SENSORS; MESOPOROUS; MESOPOROUS FILMS; MESOPOROUS THIN FILMS; POROSITY AND PORE SIZE; SENSITIVE LAYERS; SOL-GEL TECHNIQUE; VAPOR DETECTION; WATER ADSORPTION;

ACOUSTIC WAVES; ACOUSTICS; ACTUATORS; ADSORPTION; ATMOSPHERIC TEMPERATURE; ETHANOL; GELS; MESOPOROUS MATERIALS; MICROSYSTEMS; PIEZOELECTRIC TRANSDUCERS; PORE SIZE; SILICON COMPOUNDS; SOL-GEL PROCESS; SOL-GELS; SOLS; THIN FILMS; TOLUENE; VAPORS; VOLATILE ORGANIC COMPOUNDS;

SOLID-STATE SENSORS;

EID: 71449083525     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285464     Document Type: Conference Paper

References (9)

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