Metallic tungsten nanostructures and highly nanostructured thin films by deposition of tungsten oxide and subsequent reduction in a single hot-wire CVD process

Chemical Vapor Deposition

Volumn 18, Issue 1-3, 2012, Pages 70-75

  Harks, Peter Paul R M L ^a   Houweling, Z Silvester ^a   De Jong, Michiel ^a   Kuang, Yinghuan ^a   Geus, John W ^b   Schropp, Ruud E I ^a  

^a UTRECHT UNIVERSITY   (Netherlands)

^b UTRECHT UNIVERSITY   (Netherlands)

Author keywords

Hot wire CVD; Hydrogen; Nanostructures; Tungsten; Tungsten oxide

Indexed keywords

CHEMICAL VAPOR DEPOSITION; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; HYDROGEN; METALS; NANOSTRUCTURES; OXIDE FILMS; OXIDES; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY; TUNGSTEN; ULTRATHIN FILMS; WIRE; X RAY DIFFRACTION;

HOT WIRE CHEMICAL VAPOR DEPOSITION; HOT WIRE CVD; INTERNAL MORPHOLOGY; METALLIC STRUCTURES; NANOSTRUCTURED THIN FILM; SUBATMOSPHERIC PRESSURES; SUBSEQUENT REDUCTION; TUNGSTEN OXIDE;

TUNGSTEN COMPOUNDS;

EID: 84859056677     PISSN: 09481907     EISSN: 15213862     Source Type: Journal    
DOI: 10.1002/cvde.201106955     Document Type: Article

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