Modelling of an RF plasma shower

Journal of Physics D: Applied Physics

Volumn 45, Issue 14, 2012, Pages

  Atanasova, M ^a,b   Carbone, E A D ^c   Mihailova, D ^c   Benova, E ^b   Degrez, G ^a   Van Der Mullen, J J A M ^c  

^a UNIVERSITÉ LIBRE DE BRUXELLES   (Belgium)

^b SU ^*  (Bulgaria)

^c EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVE SPECIES; ARGON GAS; BULK VELOCITY; CONNECTED REGION; DRIFT DIFFUSION; ELECTRON ENERGY BALANCE; GROUNDED ELECTRODES; INNER-ELECTRODES; MASS BALANCE EQUATIONS; NAVIER STOKES; PLASMA DYNAMICS; RADIO FREQUENCY DISCHARGES; RECIRCULATIONS; RF PLASMA; SPACE BETWEEN; TIME-DEPENDENT; TWO DIMENSIONAL FLUID MODEL; VELOCITY FIELD;

ATMOSPHERIC PRESSURE; DISCHARGE (FLUID MECHANICS); DYNAMICS; ELECTRODES; FLOW OF GASES; PLASMA DIAGNOSTICS; PLASMAS; POISSON EQUATION; VELOCITY;

ELECTRIC DISCHARGES;

EID: 84858959037     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/45/14/145202     Document Type: Article

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