A flexible platform for simulations of sputtering hollow cathode discharges for laser applications

Journal of Physics D: Applied Physics

Volumn 41, Issue 24, 2008, Pages

  Mihailova, D ^a,b   Grozeva, M ^a   Hagelaar, G J M ^c   Van Dijk, J ^b   Brok, W J M ^b   Van Der Mullen, J J A M ^b  

^a BULGARIAN ACADEMY OF SCIENCES   (Bulgaria)

^b EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^c d'Hydraulique et des Telecommunications   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CATHODE MATERIALS; COPPER IONS; DESIGN PARAMETERS; DESIGN TOOLS; DISCHARGE GEOMETRIES; DISCHARGE PROCESS; EMPIRICAL FORMULAS; EXPERIMENTAL DATUM; FLEXIBLE PLATFORMS; HOLLOW CATHODE DISCHARGES; INFRA REDS; MEASURED DATUM; METALLIC BOUNDARIES; OBSERVED QUANTITIES; OPERATING CONDITIONS; OPTIMAL CONDITIONS; PLASMA SPECIES; SIMULATION MODELS; SPUTTERING YIELDS; TIME DEPENDENTS;

ARGON; CATHODES; GAS MIXTURES; HELIUM; LASER APPLICATIONS; METAL IONS; SPUTTERING;

INDUCTIVELY COUPLED PLASMA;

EID: 65449185031     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/41/24/245202     Document Type: Article

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