Discharge characteristics of an atmospheric-pressure capacitively coupled radio-frequency argon plasmas

Physics Letters, Section A: General, Atomic and Solid State Physics

Volumn 360, Issue 2, 2006, Pages 304-308

  Li, Shou Zhe ^a   Lim, Jin Pyo ^b   Uhm, Han S ^b  

^a State Key Laboratory for Materials Modification by Laser   (China)

^b Ajou University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ATMOSPHERIC PRESSURE; ELECTRIC DISCHARGES; ELECTRIC POWER SYSTEMS; EQUIVALENT CIRCUITS; RADIO WAVES;

CAPACITIVELY COUPLED; COAXIAL CYLINDRICAL ELECTRODES; DISCHARGE CHARACTERISTICS; ELECTRICAL DISCHARGES; EQUIVALENT CIRCUIT MODEL; POWER BALANCE EQUATIONS; RADIO-FREQUENCY POWER SUPPLY; VOLTAGE CHARACTERISTICS;

ELECTRON TEMPERATURE;

EID: 33750458985     PISSN: 03759601     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.physleta.2006.08.036     Document Type: Article

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