Numerical model of an argon atmospheric pressure RF discharge

IEEE Transactions on Plasma Science

Volumn 36, Issue 5 SUPPL. 4, 2008, Pages 2782-2787

  Balcon, Nicolas ^a   Hagelaar, G J M ^a   Boeuf, J P ^a  

^a Laboratoire Plasma et Conversion d'Energie   (France)

Author keywords

transition; Alpha and gamma regime; Atmospheric pressure discharges; Fluid model; RF discharges

Indexed keywords

ALPHA AND GAMMA REGIME; ARGON DISCHARGES; ATMOSPHERIC PRESSURE DISCHARGES; DIFFERENTIAL CONDUCTIVITY; EXTERNAL CIRCUITS; FILAMENTARY MODE; FLUID MODEL; FLUID MODELS; LOW CURRENT DENSITY; NUMERICAL MODELS; RADIO FREQUENCY DISCHARGES; REGIME TRANSITION; RF DISCHARGE; RF DISCHARGES; RF EXCITATION; SECONDARY ELECTRON EMISSIONS; SECONDARY ELECTRONS; SECONDARY EMISSION COEFFICIENTS; SIMULATION RESULT; TWO-REGIME;

ARGON; ATMOSPHERICS; FILAMENTS (LAMP); PLASMA FLOW; PLASMAS; SECONDARY EMISSION;

ATMOSPHERIC PRESSURE;

EID: 68049088835     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2008.2003135     Document Type: Article

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