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Volumn 16, Issue 9, 2001, Pages 919-921
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A capacitively coupled microplasma (CCμP) formed in a channel in a quartz wafer
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Author keywords
[No Author keywords available]
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Indexed keywords
ATMOSPHERIC PRESSURE;
CAPACITANCE;
QUARTZ;
RESONATORS;
CAPACITIVELY COUPLED MICROPLASMAS;
PLASMA THEORY;
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EID: 0035526819
PISSN: 02679477
EISSN: None
Source Type: Journal
DOI: 10.1039/b103507j Document Type: Article |
Times cited : (71)
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References (18)
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