A thermally tunable, silicon-based optical filter

Sensors and Actuators, A: Physical

Volumn 103, Issue 1-2, 2003, Pages 93-99

  Hohlfeld, Dennis ^a   Epmeier, Matthias ^a   Zappe, Hans ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

Micromachined suspension; Thermo optic effect; Tunable optical filters; Wavelength division multiplexing

Indexed keywords

COMPUTER SIMULATION; DIELECTRIC MATERIALS; FABRY-PEROT INTERFEROMETERS; MICROELECTROMECHANICAL DEVICES; SILICON; WAVELENGTH DIVISION MULTIPLEXING;

THERMAL MODULATION;

OPTICAL FILTERS;

EID: 0037438984     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(02)00320-5     Document Type: Conference Paper

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