Direct measurements and numerical simulations of gas charging in microelectromechanical system capacitive switches

Applied Physics Letters

Volumn 100, Issue 8, 2012, Pages

  Venkattraman, A ^a   Garg, A ^b   Peroulis, D ^b   Alexeenko, A A ^a,b  

^a Purdue University   (United States)

^b PURDUE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AIR-GAPS; CAPACITIVE SWITCH; CHARGING MECHANISM; DIRECT MEASUREMENT; ELECTRON AVALANCHES; EMISSION COEFFICIENT; FOWLER-NORDHEIM; GAS BREAKDOWN; GAS PRESSURES; HIGH-RESOLUTION CURRENT MEASUREMENTS; MICRO ELECTRO MECHANICAL SYSTEM; MICROSWITCHES; PARTICLE-IN-CELL;

ELECTRIC CHARGE; ELECTRIC SWITCHES; FIELD EMISSION; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES;

MICROMECHANICS;

EID: 84857695972     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3688176     Document Type: Article

References (17)

1. G. Rebeiz, RF MEMS Theory, Design, Technology (John Wiley Sons, Inc., New York, 2003).
2. D. Molinero, R. Comulada, and L. Castaner, Appl. Phys. Lett. 89, 103506 (2006). 10.1063/1.2335799 (Pubitemid 44359655)
3. G. Papaioannou, J. Papapolymerou, P. Pons, and R. Plana, Appl. Phys. Lett. 90, 233507 (2007). 10.1063/1.2746056 (Pubitemid 46960335)
4. Y. Raizer, Gas Discharge Physics (Springer, Berlin, 1991).
5. D. Go and D. Pohlman, J. Appl. Phys. 107, 103303 (2010). 10.1063/1.3380855
6. J. Torres and R. Dhariwal, Nanotechnology 10, 102 (1999). 10.1088/0957-4484/10/1/020
7. A. Wallash and L. Levit, Proc. SPIE 4980, 87 (2003). 10.1117/12.478191
8. P. Czarnecki, X. Rottenberg, R. Puers, and I. D. Wolf, in 19th IEEE International Conference on MEMS, Istanbul, Turkey (IEEE, Piscataway, NJ, 2006), pp. 890-893.
9. J. Muldavin, C. Bozler, S. Rabe, P. Wyatt, and C. Keast, in 43rd Annual GOMAC Tech Conference, Orlando, FL, 16-19 March 2009.
10. U. Zaghloul, B. Bhushan, P. Pons, G. Papaioannou, F. Coccetti, and R. Plana, Nanotechnology 22, 035705 (2011). 10.1088/0957-4484/22/3/035705
11. R. Fowler and L. Nordheim, Proc. R. Soc. London, Ser. A 119, 173 (1928). 10.1098/rspa.1928.0091
12. R. Burgess, H. Kroemer, and J. Houston, Phys. Rev. 90, 515 (1953). 10.1103/PhysRev.90.515
13. T. Stern, B. Gossling, and R. Fowler, Proc. R. Soc. London, Ser. A 124, 699 (1929). 10.1098/rspa.1929.0147
14. R. Tirumala and D. Go, Appl. Phys. Lett. 97, 151502 (2010). 10.1063/1.3497231
15. A. Garg, A. Venkattraman, A. Kovacs, A. Alexeenko, and D. Peroulis, in 24th IEEE International Conference on MEMS, Cancun, Mexico (IEEE, Piscataway, NJ, 2011), pp. 412-415.
16. J. Verboncoeur, M. Alves, V. Vahedi, and C. K. Birdsall, J. Comput. Phys. 104, 321 (1993). 10.1006/jcph.1993.1034
17. W. Zhang, T. Fisher, and S. Garimella, J. Appl. Phys. 96, 6066 (2004). 10.1063/1.1806264 (Pubitemid 40715244)