SCOPUS 정보 검색 플랫폼

Optics Letters

Volumn 37, Issue 4, 2012, Pages 563-565

Sub-100 nm structuring of indium-tin-oxide thin films by sub-15 femtosecond pulsed near-infrared laser light

(6) Afshar, Maziar a Straub, Martin a Voellm, Henning a Feili, Dara a Koenig, Karsten a Seidel, Helmut a

a SAARLAND UNIVERSITY (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ABLATION THRESHOLDS; FEMTOSECOND PULSED LASER; FEMTOSECONDS; HIGH REPETITION RATE; INDIUM TIN OXIDE; LATERAL DIMENSION; NEAR INFRARED; NEAR-INFRARED LASERS; OXYGEN CONTENT; RADIANT EXPOSURE; SUB-100 NM; SUBTHRESHOLD;

HYDROCHLORIC ACID; INDIUM; INFRARED DEVICES; MAGNETRONS; NANOWIRES; TIN;

THIN FILMS;

EID: 84857289912 PISSN: 01469592 EISSN: 15394794 Source Type: Journal
DOI: 10.1364/OL.37.000563 Document Type: Article

Times cited : (23)

References (25)

1
- 84889477273
- Wiley
- D. C. Paine, H.-Y. Yeom, and B. Yaglioglu, in Flexible and Flat Panel Displays (Wiley, 2005), pp. 79-98.
- (2005) Flexible and Flat Panel Displays , pp. 79-98
- Paine, D.C.¹ Yeom, H.-Y.² Yaglioglu, B.³

2
- 36549099749
- I. Hamberg and C. Granqvist, J. Appl. Phys. 60, R123 (1986).
- (1986) J. Appl. Phys. , vol.60
- Hamberg, I.¹ Granqvist, C.²

3
- 0020766567
- S. Ray, R. Banerjee, N. Basu, A. K. Batabyal, and A. K. Barua, J. Appl. Phys. 54, 3497 (1983).
- (1983) J. Appl. Phys. , vol.54 , pp. 3497
- Ray, S.¹ Banerjee, R.² Basu, N.³ Batabyal, A.K.⁴ Barua, A.K.⁵

4
- 34548863363
- M.-F. Chen, Y.-P. Chen, W.-T. Hsiao, and Z.-P. Gu, Thin Solid Films 515, 8515 (2007).
- (2007) Thin Solid Films , vol.515 , pp. 8515
- Chen, M.-F.¹ Chen, Y.-P.² Hsiao, W.-T.³ Gu, Z.-P.⁴

5
- 0003759821
- IOP Publishing
- H. Hartnagel, A. Dawar, A. Jain, and C. Jagadish, Semiconducting Transparent Thin Films (IOP Publishing, 1995).
- (1995) Semiconducting Transparent Thin Films
- Hartnagel, H.¹ Dawar, A.² Jain, A.³ Jagadish, C.⁴

6
- 0000110757
- O. Yavas and M. Takai, J. Appl. Phys. 85, 4207 (1999).
- (1999) J. Appl. Phys. , vol.85 , pp. 4207
- Yavas, O.¹ Takai, M.²

7
- 21944437279
- J. G. Lunny, R. R. O'Neil, and K. Schulmeister, Appl. Phys. Lett. 59, 647 (1991).
- (1991) Appl. Phys. Lett. , vol.59 , pp. 647
- Lunny, J.G.¹ O'neil, R.R.² Schulmeister, K.³

8
- 33747512859
- M. Y. Xu, J. Li, L. D. Lilge, and P. R. Herman, Appl. Phys. A 85, 7 (2006).
- (2006) Appl. Phys. A , vol.85 , pp. 7
- Xu, M.Y.¹ Li, J.² Lilge, L.D.³ Herman, P.R.⁴

9
- 2342572346
- R. Tanaka, T. Tokaoka, H. Mizukami, T. Arai, and Y. Iwai, Proc. SPIE 5063, 370 (2003).
- (2003) Proc. SPIE , vol.5063 , pp. 370
- Tanaka, R.¹ Tokaoka, T.² Mizukami, H.³ Arai, T.⁴ Iwai, Y.⁵

10
- 27744487568
- M. Park, B. H. Chon, H. S. Kim, S. C. Jeoung, D. Kim, J. Lee, H. Y. Chu, and H. R. Kim, Opt. Lasers Eng. 44, 138 (2006).
- (2006) Opt. Lasers Eng. , vol.44 , pp. 138
- Park, M.¹ Chon, B.H.² Kim, H.S.³ Jeoung, S.C.⁴ Kim, D.⁵ Lee, J.⁶ Chu, H.Y.⁷ Kim, H.R.⁸

11
- 36049020317
- Ph.D. thesis (University of London)
- S. Bashar, "Study of indium tin oxide (ITO) for novel optoelectronic devices," Ph.D. thesis (University of London, 1998).
- (1998) Study of Indium Tin Oxide (ITO) for Novel Optoelectronic Devices
- Bashar, S.¹

12
- 0002764069
- J. S. Kim, F. Cacialli, A. Cola, G. Gigli, and R. Cingolani, Appl. Phys. Lett. 75, 19 (1999).
- (1999) Appl. Phys. Lett. , vol.75 , pp. 19
- Kim, J.S.¹ Cacialli, F.² Cola, A.³ Gigli, G.⁴ Cingolani, R.⁵

13
- 59449097532
- Oxford University
- K. Koenig, in Handbook of Biological Nonlinear Optical Microscopy (Oxford University, 2008), pp. 689-706.
- (2008) Handbook of Biological Nonlinear Optical Microscopy , pp. 689-706
- Koenig, K.¹

14
- 84893885908
- H. Kim, A. Pique, J. S. Horwitz, H. Mattoussi, H. Murata, Z. H. Kafafi, and D. B. Chrisey, Appl. Phys. Lett 74, 23 (1999).
- (1999) Appl. Phys. Lett , vol.74 , pp. 23
- Kim, H.¹ Pique, A.² Horwitz, J.S.³ Mattoussi, H.⁴ Murata, H.⁵ Kafafi, Z.H.⁶ Chrisey, D.B.⁷

15
- 84959562458
- G. Wiedemann and R. Franz, Ann. Phys. 165, 497 (1853).
- (1853) Ann. Phys. , vol.165 , pp. 497
- Wiedemann, G.¹ Franz, R.²

16
- 0007038475
- R. B. Belser and W. H. Hicklin, J. Appl. Phys. 30, 313 (1959).
- (1959) J. Appl. Phys. , vol.30 , pp. 313
- Belser, R.B.¹ Hicklin, W.H.²

17
- 65249167470
- T. Ashida, A. Miyamura, N. Oka, Y. Sato, T. Yagi, N. Taketoshi, T. Baba, and Y. Shigesato, J. Appl. Phys. 105, 073709 (2009).
- (2009) J. Appl. Phys. , vol.105 , pp. 073709
- Ashida, T.¹ Miyamura, A.² Oka, N.³ Sato, Y.⁴ Yagi, T.⁵ Taketoshi, N.⁶ Baba, T.⁷ Shigesato, Y.⁸

18
- 6044229065
- M. Birnbaum, J. Appl. Phys. 36, 3688 (1965).
- (1965) J. Appl. Phys. , vol.36 , pp. 3688
- Birnbaum, M.¹

19
- 26144466425
- H. M. Van Driel, J. E. Spie, and J. F. Young, Phys. Rev. Lett. 49, 1955 (1982).
- (1982) Phys. Rev. Lett. , vol.49 , pp. 1955
- Van Driel, H.M.¹ Spie, J.E.² Young, J.F.³

20
- 0038374098
- A. Borowiec and H. K. Haugen, Appl. Phys. Lett. 82, 4462 (2003).
- (2003) Appl. Phys. Lett. , vol.82 , pp. 4462
- Borowiec, A.¹ Haugen, H.K.²

21
- 0037390572
- N. Yasumaro, K. Myazaki, and J. Kiuchi, Appl. Phys. A 76, 983 (2003).
- (2003) Appl. Phys. A , vol.76 , pp. 983
- Yasumaro, N.¹ Myazaki, K.² Kiuchi, J.³

22
- 79251474374
- R. Le Harzic, D. Doerr, D. Sauer, M. Neumeier, M. Apple, H. Zimmermann, and F. Stracke, Opt. Lett. 36, 229 (2011).
- (2011) Opt. Lett. , vol.36 , pp. 229
- Le Harzic, R.¹ Doerr, D.² Sauer, D.³ Neumeier, M.⁴ Apple, M.⁵ Zimmermann, H.⁶ Stracke, F.⁷

23
- 4344678019
- F. Costache, S. Kouteva-Arguirova, and J. Reif, Appl. Phys. A 79, 1429 (2004).
- (2004) Appl. Phys. A , vol.79 , pp. 1429
- Costache, F.¹ Kouteva-Arguirova, S.² Reif, J.³

24
- 19944431254
- J. Bonse, M. Muz, and H. Sturm, J. Appl. Phys. 97, 013538 (2005).
- (2005) J. Appl. Phys. , vol.97 , pp. 013538
- Bonse, J.¹ Muz, M.² Sturm, H.³

25
- 0039329496
- M. Inoue, T. Matsuoka, Y. Fujita, and A. Abe, Jpn. J. Appl. Phys. 28, 274 (1989).
- (1989) Jpn. J. Appl. Phys. , vol.28 , pp. 274
- Inoue, M.¹ Matsuoka, T.² Fujita, Y.³ Abe, A.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.