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Applied Physics A: Materials Science and Processing

Volumn 85, Issue 1, 2006, Pages 7-10

F2-laser patterning of indium tin oxide (ITO) thin film on glass substrate

(4) Xu, M Y a Li, J a Lilge, L D a Herman, P R a

a UNIVERSITY OF TORONTO (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRIC CONDUCTIVITY; INDIUM COMPOUNDS; LASER APPLICATIONS; OPTICAL MICROSCOPY; SEMICONDUCTING GLASS; SUBSTRATES; X RAY ANALYSIS;

GLASS SUBSTRATES; LASER PATTERNING; MICROCHANNELS; MICROFLUIDIC SYSTEMS;

THIN FILMS;

EID: 33747512859 PISSN: 09478396 EISSN: 14320630 Source Type: Journal
DOI: 10.1007/s00339-006-3657-2 Document Type: Article

Times cited : (43)

References (14)

1
- 0343472815
- S. Ishibashi, Y. Higuchi, Y. Ota, K. Nakamura, J. Vac. Sci. Technol. A 8, 1339 (1990)
- (1990) J. Vac. Sci. Technol. A , vol.8 , pp. 1339
- Ishibashi, S.¹ Higuchi, Y.² Ota, Y.³ Nakamura, K.⁴

2
- 2942595867
- R.X. Wang, C.D. Beling, A.B. Djurišić, S. Li, S. Fung, Semicond. Sci. Technol. 19, 695 (2004)
- (2004) Semicond. Sci. Technol. , vol.19 , pp. 695
- Wang, R.X.¹ Beling, C.D.² Djurišić, A.B.³ Li, S.⁴ Fung, S.⁵

3
- 0000110757
- O. Yavas, M. Takai, J. Appl. Phys. 85, 4207 (1999)
- (1999) J. Appl. Phys. , vol.85 , pp. 4207
- Yavas, O.¹ Takai, M.²

4
- 21944437279
- J.G. Lunney, R.R. O'Neill, K. Schulmeister, Appl. Phys. Lett. 59, 647 (1991)
- (1991) Appl. Phys. Lett. , vol.59 , pp. 647
- Lunney, J.G.¹ O'Neill, R.R.² Schulmeister, K.³

5
- 0034806557
- OSA TOPS Conf. on Lasers and Electro-Optics
- P.R. Herman, K.P. Chen, X.M. Wei, J. Zhang, J. Ihlemann, D. Scharfer, G. Marowsky, P. Oesterlin, B. Burghardt, OSA TOPS Conf. on Lasers and Electro-Optics, Tech. Digest Vol.56, pp.574-577 (2001)
- (2001) Tech. Digest , vol.56 , pp. 574-577
- Herman, P.R.¹ Chen, K.P.² Wei, X.M.³ Zhang, J.⁴ Ihlemann, J.⁵ Scharfer, D.⁶ Marowsky, G.⁷ Oesterlin, P.⁸ Burghardt, B.⁹

6
- 33747517771
- Williamsburg, Va, USA April 4-8
- H.W. Choi, D. Farson, K.-R. Kim, S.-K. Hong, Laser Precision Machining Conf., Laser Precision Microfabrication-LPM 2005, Williamsburg, Va, USA April 4-8 (2005)
- (2005) Laser Precision Machining Conf., Laser Precision Microfabrication-LPM 2005
- Choi, H.W.¹ Farson, D.² Kim, K.-R.³ Hong, S.-K.⁴

7
- 0036407045
- D. Ashkenasi, A. Rosenfeld, Proc. SPIE 4637, 169 (2002)
- (2002) Proc. SPIE , vol.4637 , pp. 169
- Ashkenasi, D.¹ Rosenfeld, A.²

8
- 33747456491
- Göttingen, Germany
- R. Kupfer, H.W. Bergmann, The European Conf. on Laser Treatment of Materials, 1992 (ECLAT'92), Göttingen, Germany (1992) pp. 547-552
- (1992) The European Conf. on Laser Treatment of Materials, 1992 (ECLAT'92) , pp. 547-552
- Kupfer, R.¹ Bergmann, H.W.²

9
- 31044456393
- T. Yagi, K. Tamano, Y. Sato, N. Taketoshi, T. Baba, Y. Shigesato, J. Vac. Sci. Technol. 23, 1180 (2005)
- (2005) J. Vac. Sci. Technol. , vol.23 , pp. 1180
- Yagi, T.¹ Tamano, K.² Sato, Y.³ Taketoshi, N.⁴ Baba, T.⁵ Shigesato, Y.⁶

10
- 0242445383
- P.R. Herman, R.S. Marjoribanks, A. Oettl, K.P. Chen, I. Konovalov, S. Ness, Appl. Surf. Sci 577, 154 (2000)
- (2000) Appl. Surf. Sci , vol.577 , pp. 154
- Herman, P.R.¹ Marjoribanks, R.S.² Oettl, A.³ Chen, K.P.⁴ Konovalov, I.⁵ Ness, S.⁶

11
- 0004207635
- Berlin, Springer
- W.M. Steen, Laser Material Processing, 3rd ed. (Berlin, Springer, 2003)
- (2003) Laser Material Processing, 3rd Ed.
- Steen, W.M.¹

12
- 33747484313
- D. Bloom, George G. Li, Kai Zhang, A. Rahim Forouhi, I. Bloomer, Proc. SPIE 3275, (1998)
- (1998) Proc. SPIE , vol.3275
- Bloom, D.¹ Li, G.G.² Zhang, K.³ Rahim Forouhi, A.⁴ Bloomer, I.⁵

13
- 0001072143
- E. Sutcliffe, R. Srinivasan, J. Appl. Phys. 60, 3315 (1986)
- (1986) J. Appl. Phys. , vol.60 , pp. 3315
- Sutcliffe, E.¹ Srinivasan, R.²

14
- 33747476251
- J.M. Bovatsek, A.Y. Arai, F. Yoshino, Y. Uehara, Proc. SPIE 6102, (2006)
- (2006) Proc. SPIE , vol.6102
- Bovatsek, J.M.¹ Arai, A.Y.² Yoshino, F.³ Uehara, Y.⁴

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