Surface micromachined MEMS tunable VCSEL at 1550 nm with > 70 nm single mode tuning

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8276, Issue , 2012, Pages

  Gierl, Christian ^a   Gründl, Tobias ^b   Debernardi, Pierluigi ^c   Zogal, Karolina ^a   Davani, Hooman A ^a   Grasse, Christian ^b   Böhm, Gerhard ^b   Meissner, Peter ^a   Küppers, Franko ^a   Amann, Markus Christian ^b  

^a DARMSTADT UNIVERSITY OF TECHNOLOGY   (Germany)

^b WALTER SCHOTTKY INSTITUT   (Germany)

^c Istituto di Elettronica e di Ingegneria Dell Informazione e Delle Telecomunicazioni   (Italy)

Author keywords

MEMS; surface micro machining; Tunable VCSEL

Indexed keywords

1550 NM; CAVITY LENGTH; IS COSTS; LOW TEMPERATURE PLASMAS; MASS PRODUCTION; ON-WAFER; OUTPUT POWER; RESONANT WAVELENGTHS; SIDE MODE SUPPRESSION RATIOS; SINGLE MODE; SURFACE MICROMACHINED MEMS; TECHNOLOGY USE; TUNING MECHANISM; TUNING RANGES; VERTICAL-CAVITY SURFACE EMITTING LASER;

CHEMICAL VAPOR DEPOSITION; DIELECTRIC MATERIALS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SURFACE EMITTING LASERS;

MOEMS;

EID: 84857217575     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.907800     Document Type: Conference Paper

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