Simultaneous spectroscopy of NH3 and CO using a > 50 nm continuously tunable MEMS-VCSEL

IEEE Sensors Journal

Volumn 7, Issue 11, 2007, Pages 1483-1488

  Kögel, Benjamin ^a   Halbritter, Hubert ^a   Jatta, Sandro ^a   Maute, Markus ^b   Böhm, Gerhard ^b   Amann, Markus Christian ^b   Lackner, Maximilian ^c   Schwarzott, Michael ^c   Winter, Franz ^d   Meissner, Peter ^a  

^a DARMSTADT UNIVERSITY OF TECHNOLOGY   (Germany)

^b WALTER SCHOTTKY INSTITUT   (Germany)

^c ProcessEng Engineering GmbH   (Austria)

^d VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

Absorption spectroscopy; Ammonia (NH3); Carbon monoxide (CO); Microelectromechanical systems (MEMS); Tunable laser; Vertical cavity surface emitting laser (VCSEL)

Indexed keywords

ABSORPTION SPECTROSCOPY; AMMONIA; BROADBAND NETWORKS; LASER TUNING; SEMICONDUCTOR LASERS; SURFACE EMITTING LASERS; WAVELENGTH;

BROADBAND ABSORBANCE SPECTRA; CARBON MONOXIDE (CO); TUNABLE DIODE LASER ABSORPTION SPECTROSCOPY; TUNABLE LASER SPECTROMETERS;

MEMS;

EID: 34748875214     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2007.907055     Document Type: Article

References (13)

1. 3) near 1.54 μm," Appl. Phys. B, vol. 76, pp. 603-608, 2003.
2. L. S. Rothman et al., "The HITRAN 2004 molecular spectroscopic database," J. Quant. Spectrosc. Radiat. Transfer, vol. 96, pp. 139-204, 2005.
3. M. E. Webber, D. S. Baer, and R. K. Hanson, "Ammonia monitoring near 1.5 μm with diode-laser absorption, sensors," Appl. Optics, vol. 40, pp. 2031-2042, 2001.
4. H. P. Zappe, M. Hess, M. Moser, R. Hövel, K. Gulden, H.-P. Gauggel, and F. M. di Sopra, "Narrow-linewidth vertical-cavity surface-emitting lasers for oxygen detection," Appl, Optics, vol. 39, no. 15, pp. 2475-2479, 2000.
5. M. Maute, B. Kögel, G. Böhm, P. Meissner, and M.-C. Amann, "MEMS-tunable 1.55 μm VCSEL with extended tuning range incorporating a buried tunnel junction," IEEE Photon. Technol. Lett., vol. 18, pp. 688-690, 2006.
6. D. Huber, P. Corredoura, S. Lester, V. Robbins, and L. Kamas, "Reducing Brownian motion in an electrostatically tunable MEMS laser," J. Microelectromech. Syst., vol. 13, pp. 732-736, 2004.
7. -1," J. Mol. Spectr., vol. 162, pp. 230-245, 1993.
8. B. Kögel, H. Halbritter, M. Maute, G. Böhm, M.-C. Amann, and P. Meissner, "Singlemode and polarization stable MEMS-VCSEL with, broadband tuning characteristics around 1.55 &μm," in Proc. 32nd Eur. Conf. Opt. Commun., Cannes, Franc, 2006, vol. 2, pp. 81-82, (Tu3.4.4).
9. B. Kögel, H. Halbritter, M. Lackner, M. Schwarzott, M. Maute, M.-C. Amann, F. Winter, and P. Meissner, "Micromechanically widely tunable VCSEL for absorption spectroscopy at around 1.55 μm," in Proc. IEEE/LEOS Int. Conf. Opt. MEMS Appl., Big Sky, MT, 2006, pp. 7-8, (MA2).
10. F. Riemenschneider, M. Maute, H. Halbritter, G. Böhm, M.-C. Amann, and P. Meissner, "Continuously tunable long-wavelength MEMS-VCSEL with over 40-nm tuning range," IEEE Photon. Technol. Lett., vol. 16, no. 10, pp. 2212-2214, Oct. 2004.
11. T. Okoshi, K. Kikuchi, and A. Nakayama, "Novel method for high resolution measurement of laser output spectrum," Electron. Lett., vol. 16, no. 16, pp. 630-631, Jul. 1980.
12. 2 spectroscopy using a 60 nm broadband tunable MEMS-VCSEL at ∼ 1.55 μm," Optics. Lett., vol. 31, no. 21, pp. 3170-3172, 2006.
13. X. Zhou, X. Liu, J. B. Jeffries, and R. K. Hanson, "Development of a sensor for temperature and water concentration in combustion gases using a single tunable diode laser," Meas. Sci. Technol., vol. 14, pp. 1459-1468, 2003.